C23C 16/12
Deposition of aluminium only
C23C16/12 (Deposition of aluminium only) appears on 48 US grants and 54 published applications in this corpus.
Search patents in C23C- Granted patents
- 48
- Published applications
- 54
- Assignees
- 35
- Inventors
- 165
- Latest grant
- 13 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 0 |
| 2003 | 0 | 3 |
| 2004 | 0 | 1 |
| 2005 | 0 | 2 |
| 2006 | 1 | 2 |
| 2007 | 0 | 3 |
| 2008 | 1 | 1 |
| 2009 | 0 | 2 |
| 2010 | 0 | 1 |
| 2011 | 2 | 2 |
| 2012 | 3 | 2 |
| 2013 | 0 | 1 |
| 2014 | 0 | 1 |
| 2015 | 2 | 0 |
| 2016 | 2 | 1 |
| 2017 | 0 | 3 |
| 2018 | 1 | 3 |
| 2019 | 0 | 3 |
| 2020 | 6 | 5 |
| 2021 | 1 | 4 |
| 2022 | 5 | 3 |
| 2023 | 2 | 1 |
| 2024 | 3 | 5 |
| 2025 | 4 | 3 |
| 2026 | 1 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Gas barrier laminate, and gas barrier packaging material and pillow packaging bag formed of the laminate13 Jan 2026US 12,522,413 B2Dai Nippon Printing Co.Ltd.
- Vaporization vessel and method25 Nov 2025US 12,480,209 B2Entegris, Inc.
- Methods for depositing film layers11 Nov 2025US 12,467,132 B2APPLIED Materials.Inc.
- Gas barrier aluminum deposition film and preparation method thereof6 May 2025US 12,291,774 B2Toray Advanced Materials Korea Inc.
- Method for forming and patterning color centers29 Apr 2025US 12,286,539 B2The Board of Trustees of the Leland Stanford Junior University
- Forming intermetal nitride phase in metal nitride layer16 Jul 2026US 2026/0201533 A1Lam Research Corporation
- Aluminum hydride precursor for aluminum metal ald9 Jul 2026US 2026/0193783 A1APPLIED Materials.Inc.
- Methods for Depositing Film Layers27 Mar 2025US 2025/0101575 A1APPLIED Materials.Inc.
- Methods and systems for filling a gap27 Feb 2025US 2025/0066905 A1ASM IP Holding B. V.
- Metal getters in vaporizers for impurity removal16 Jan 2025US 2025/0019822 A1Entegris, Inc.
Most cited
By later US patents
- Thermal barrier coating system with intermediate phase bondcoat94US 5,716,720 AHowmet Corporation · 1998
- Fabrication method for digital micro-mirror devices using low temperature CVD66US 5,526,951 ATexas Instruments Incorporated · 1996
- Platinum aluminide CVD coating method62US 5,658,614 AHowmet Research Corporation · 1997
- Thermal barrier coating system with intermediate phase bondcoat57US 5,856,027 AHowmet Research Corporation · 1999
- Diffusion coating method41US 4,004,047 AGeneral Electric Company · 1977