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US 12,480,209 B2Granted
Vaporization vessel and method
AssigneeEntegris, Inc.
InventorsBryan C. Hendrix, Scott L. Battle, David J. Eldridge, John N. Gregg, Jacob Thomas, Manuel F. Gonzales, Kenney R. Jordan, Benjamin H. Olson
Life of this patent
Estimating the term…
Abstract
A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.
Claims7
A method of assembling a tray of a vaporization vessel, comprising
- forming the tray which comprises a side wall, a bottom plate, an interior space defined by the side wall and the bottom plate, and one or more apertures that extend through the bottom plate;
- placing one or more pre-made arms in the tray;
- and
- securing the one or more pre-made arms to the tray, with one or more removable fasteners such that the one or more pre-made arms are non-destructibly removable from the tray to allow for cleaning of the tray and the one or more pre-made arms to lower impurity formation during use of the vaporization vessel.
1 more element
Dependencies are inferred from the claim text.