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US 2025/0019822 A1Published application
Metal getters in vaporizers for impurity removal
AssigneeEntegris, Inc.
InventorsBryan C. Hendrix, Scott L. Battle, Dalton Vance Locklear
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Abstract
Metal getters in vaporizers, and related systems and methods, are provided. A vaporizer comprises a vessel having an outlet. The vessel is configured to discharge a metal halide vapor through the outlet. The vaporizer comprises a metal getter located within the vessel between the inlet and the outlet. When an oxygen-containing species is present within the vessel, an impurity content of the metal halide vapor that is discharged from the vessel is less than an impurity content of a precursor vapor that is discharged from a vessel without the metal getter.
Claims36
A vaporizer comprising:
- a vessel having an outlet, the vessel containing:
- a vaporizable precursor that, when vaporized, produces a metal halide vapor;
- an oxygen-containing species;
- and
- a metal getter;
- wherein the metal getter is configured to reduce an impurity content of the metal halide vapor exiting through the outlet of the vessel to less than 1% by volume of an impurity based on a total volume of the metal halide vapor.
3 more elements
Dependencies are inferred from the claim text.