C23C 14/0052
Bombardment of substrates by reactive ion beams
Official title: {Bombardment of substrates by reactive ion beams}
C23C14/0052 (Bombardment of substrates by reactive ion beams) appears on 28 US grants and 34 published applications in this corpus.
Search patents in C23C- Granted patents
- 28
- Published applications
- 34
- Assignees
- 26
- Inventors
- 98
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 1 | 4 |
| 2003 | 2 | 0 |
| 2004 | 1 | 5 |
| 2005 | 0 | 0 |
| 2006 | 0 | 4 |
| 2007 | 0 | 2 |
| 2008 | 0 | 1 |
| 2009 | 1 | 2 |
| 2010 | 1 | 0 |
| 2011 | 0 | 1 |
| 2012 | 1 | 1 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 1 |
| 2016 | 0 | 1 |
| 2017 | 3 | 2 |
| 2018 | 1 | 1 |
| 2019 | 0 | 2 |
| 2020 | 0 | 0 |
| 2021 | 2 | 2 |
| 2022 | 2 | 2 |
| 2023 | 1 | 2 |
| 2024 | 2 | 1 |
| 2025 | 0 | 0 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Virtual shutter in ion beam system30 Jun 2026US 12,671,062 B2Plasma-Therm NES LLC
- Yttrium oxide based coating composition5 Mar 2024US 11,920,234 B2APPLIED Materials.Inc.
- System for forming nano-laminate optical coating13 Feb 2024US 11,897,811 B2Intevac, Inc.
- Yttrium oxide based coating composition30 May 2023US 11,661,650 B2APPLIED Materials.Inc.
- Rare-earth oxide based coatings based on ion assisted deposition23 Aug 2022US 11,424,136 B2APPLIED Materials.Inc.
- Ion beam deposition of ruthenium thin films28 Mar 2024US 2024/0102150 A1Veeco Instruments Inc.
- Virtual shutter in ion beam system26 Oct 2023US 2023/0343557 A1Plasma-Therm NES LLC
- Yttrium oxide based coating composition25 May 2023US 2023/0160055 A1APPLIED Materials.Inc.
- System and method for ion-assisted deposition of optical coatings6 Oct 2022US 2022/0316045 A1KLA Corporation
- System for forming nano-laminate optical coating16 Jun 2022US 2022/0185726 A1Intevac, Inc.
Most cited
By later US patents
- Ion assisted deposition process including reactive source gassification73US 5,415,756 AUniversity of Houston · 1995
- Arrangement for the coating of substrates47US 5,122,252 ALeybold Aktiengesellschaft · 1992
- Low pressure reactive magnetron sputtering apparatus and method45US 5,525,199 AOptical Corporation of America · 1996
- Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles38US 9,583,369 B2APPLIED Materials.Inc. · 2017
- Very high vacuum magnetron sputtering method and apparatus for precision optical coatings33US 5,656,138 AOptical Corporation of America · 1997