C23C 14/0047
Activation or excitation of reactive gases outside the coating chamber
Official title: {Activation or excitation of reactive gases outside the coating chamber}
C23C14/0047 (Activation or excitation of reactive gases outside the coating chamber) appears on 53 US grants and 58 published applications in this corpus.
Search patents in C23C- Granted patents
- 53
- Published applications
- 58
- Assignees
- 46
- Inventors
- 185
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 2 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 3 | 1 |
| 2002 | 2 | 4 |
| 2003 | 2 | 2 |
| 2004 | 3 | 6 |
| 2005 | 0 | 3 |
| 2006 | 0 | 4 |
| 2007 | 0 | 3 |
| 2008 | 1 | 1 |
| 2009 | 2 | 2 |
| 2010 | 1 | 2 |
| 2011 | 0 | 1 |
| 2012 | 1 | 1 |
| 2013 | 0 | 2 |
| 2014 | 0 | 0 |
| 2015 | 0 | 3 |
| 2016 | 0 | 1 |
| 2017 | 3 | 3 |
| 2018 | 1 | 2 |
| 2019 | 1 | 5 |
| 2020 | 1 | 1 |
| 2021 | 3 | 4 |
| 2022 | 2 | 2 |
| 2023 | 2 | 3 |
| 2024 | 3 | 1 |
| 2025 | 0 | 1 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Virtual shutter in ion beam system30 Jun 2026US 12,671,062 B2Plasma-Therm NES LLC
- Deposition system with integrated cooling on a rotating drum6 Aug 2024US 12,057,297 B2
- Yttrium oxide based coating composition5 Mar 2024US 11,920,234 B2APPLIED Materials.Inc.
- System for forming nano-laminate optical coating13 Feb 2024US 11,897,811 B2Intevac, Inc.
- Yttrium oxide based coating composition30 May 2023US 11,661,650 B2APPLIED Materials.Inc.
- Film formation apparatus8 May 2025US 2025/0146125 A1Japan Display Inc.
- Ion beam deposition of ruthenium thin films28 Mar 2024US 2024/0102150 A1Veeco Instruments Inc.
- Virtual shutter in ion beam system26 Oct 2023US 2023/0343557 A1Plasma-Therm NES LLC
- Coatings of non-planar substrates and methods for the production thereof13 Jul 2023US 2023/0221467 A1Corning Incorporated
- Yttrium oxide based coating composition25 May 2023US 2023/0160055 A1APPLIED Materials.Inc.
Most cited
By later US patents
- Magnetron sputtering apparatus and process326US 4,851,095 AOptical Coating Laboratory, Inc. · 1989
- Process for depositing optical thin films on both planar and non-planar substrates96US 5,798,027 AOptical Coating Laboratory, Inc. · 1998
- Geometries and configurations for magnetron sputtering apparatus78US 5,618,388 AOptical Coating Laboratory, Inc. · 1997
- Ion assisted deposition process including reactive source gassification73US 5,415,756 AUniversity of Houston · 1995
- Method for forming a thin film of a metal compound by vacuum deposition68US 6,103,320 AShincron Co., Ltd. · 2000