Deposition system with integrated cooling on a rotating drum
AssigneeRichard Devito
InventorRichard DeVito
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Abstract
In one aspect, a system for depositing a film on a substrate is disclosed, which comprises at least one metallization source for generating metal atoms, and at least one reactive source for generating at least one reactive species. The system further includes an inner cooling cylinder and a substrate cylinder, where the inner cooling cylinder is fixedly positioned relative to the substrate cylinder, and the substrate cylinder at least partially surrounds the inner cooling cylinder. At least one mount is coupled to the substrate cylinder for mounting one or more substrates to the substrate cylinder.
Claims26
A system for depositing a film on a substrate, comprising:
- a metallization source configured to generate metal atoms,
- a reactive species source configured to generate reactive species,
- wherein the reactive species source is positioned across from the metallization source,
- a substrate cylinder configured to rotate between the metallization source and the reactive species source, said substrate cylinder having at least one mount,
- a substrate coupled to the at least one mount of the substrate cylinder,
- an inner cooled cylinder surrounded by the substrate cylinder, and
- wherein the metallization source is configured to deposit the metal atoms onto the substrate and the reactive species source is configured to deposit the reactive species onto the substrate,
- wherein the at least one mount includes an opening that exposes a back surface of the substrate mounted thereto to the inner cooled cylinder to facilitate radiative cooling of the substrate.
A system for depositing a film on a substrate comprising:
- a metallization source configured to generate metal ions,
- a reactive species source configured to generate reactive species,
- a substrate cylinder configured to rotate between the metallization source and the reactive species source, said substrate cylinder having at least one mount,
- a substrate coupled to the at least one mount of the substrate cylinder,
- an optical pyrometer configured to determine a temperature of the substrate,
- an inner cooled cylinder that is configured to cool the substrate and is surrounded by the substrate cylinder,
- wherein said at least one mount includes at least one opening that exposes a back surface of the substrate mounted thereto to the inner cool cylinder to facilitate radiative cooling of the substrate,
- wherein the inner cylinder includes a channel that carries a cooling fluid, a cryogenic chiller coupled to the channel,
- a computer system in communication with the optical pyrometer and the cryogenic chiller,
- wherein the computer system is configured to change the temperature of the cryogenic chiller based on the determined temperature of the substrate thereby changing a temperature of the cooling fluid flowing through the channel.
Dependencies are inferred from the claim text.