Rare-earth oxide based coatings based on ion assisted deposition
AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang
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Abstract
A component for a processing chamber includes a ceramic body having at least one surface with a first average surface roughness. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 μm over the at least one surface and having a second average surface roughness that is less than the first average surface roughness.
Claims20
A chamber component for a processing chamber, comprising:
- a ceramic body having at least one surface with a first average surface roughness;
- and
- a conformal protective layer on the at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 μm over the at least one surface and having a second average surface roughness that is less than the first average surface roughness, wherein the second average surface roughness is below 10 micro-inches.
A chamber component for a processing chamber, comprising:
- a ceramic body having at least one surface with a first average surface roughness;
- and
- a conformal protective layer on the at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 μm over the at least one surface and having a second average surface roughness that is less than the first average surface roughness, wherein the conformal protective layer has a composition of 40-100 mol % of Y2O3, above 0-60 mol % of ZrO2, and above 0-10 mol % of Al2O3.
A chamber component for a processing chamber, comprising:
- a ceramic body having at least one surface with a first average surface roughness;
- and
- a conformal protective layer on the at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness over the at least one surface and having a second average surface roughness that is less than the first average surface roughness, wherein the conformal protective layer has a thickness of about 0.5 μm to about 30 μm.
Dependencies are inferred from the claim text.