C23C 14/0042
Controlling partial pressure or flow rate of reactive or inert gases with
Official title: {Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements}
C23C14/0042 (Controlling partial pressure or flow rate of reactive or inert gases with) appears on 160 US grants and 184 published applications in this corpus.
Search patents in C23C- Granted patents
- 160
- Published applications
- 184
- Assignees
- 153
- Inventors
- 563
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 3 | 0 |
| 1979 | 2 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 2 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 2 | 0 |
| 1988 | 0 | 0 |
| 1989 | 2 | 0 |
| 1990 | 5 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 5 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 3 | 1 |
| 2002 | 4 | 2 |
| 2003 | 0 | 1 |
| 2004 | 4 | 0 |
| 2005 | 2 | 8 |
| 2006 | 0 | 2 |
| 2007 | 2 | 2 |
| 2008 | 0 | 5 |
| 2009 | 1 | 2 |
| 2010 | 3 | 4 |
| 2011 | 2 | 5 |
| 2012 | 3 | 13 |
| 2013 | 4 | 9 |
| 2014 | 11 | 16 |
| 2015 | 8 | 12 |
| 2016 | 6 | 14 |
| 2017 | 9 | 9 |
| 2018 | 11 | 7 |
| 2019 | 8 | 17 |
| 2020 | 4 | 9 |
| 2021 | 7 | 9 |
| 2022 | 5 | 15 |
| 2023 | 9 | 5 |
| 2024 | 4 | 9 |
| 2025 | 10 | 1 |
| 2026 | 6 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Superhard composite materials including compounds of carbon and nitrogen deposited on metal and metal nitride, carbide and carbonitride112US 5,776,615 ANorthwestern University · 1998
- Method of and apparatus for control of reactive sputtering deposition107US 4,379,040 APPG Industries, Inc. · 1983
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- Automatic film deposition control method and system63US 5,665,214 ASony Corporation · 1997
- System and method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processes62US 9,711,335 B2Advanced Energy Industries, Inc. · 2017