B81C 1/00547
Etching processes not provided for in groups b81c1/00531 - b81c1/00539
Official title: {Etching processes not provided for in groups B81C1/00531 - B81C1/00539}
B81C1/00547 (Etching processes not provided for in groups b81c1/00531 - b81c1/00539) appears on 57 US grants and 76 published applications in this corpus.
Search patents in B81C- Granted patents
- 57
- Published applications
- 76
- Assignees
- 56
- Inventors
- 150
- Latest grant
- 28 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 1 | 4 |
| 2003 | 2 | 5 |
| 2004 | 3 | 1 |
| 2005 | 1 | 8 |
| 2006 | 3 | 7 |
| 2007 | 4 | 6 |
| 2008 | 5 | 3 |
| 2009 | 2 | 0 |
| 2010 | 1 | 0 |
| 2011 | 1 | 1 |
| 2012 | 0 | 2 |
| 2013 | 2 | 4 |
| 2014 | 3 | 4 |
| 2015 | 2 | 2 |
| 2016 | 4 | 5 |
| 2017 | 3 | 3 |
| 2018 | 3 | 4 |
| 2019 | 0 | 1 |
| 2020 | 4 | 5 |
| 2021 | 3 | 6 |
| 2022 | 3 | 3 |
| 2023 | 4 | 0 |
| 2024 | 2 | 1 |
| 2025 | 0 | 1 |
| 2026 | 1 | 0 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Method and device for locally removing and/or modifying a polymer material on a surface28 Apr 2026US 12,612,305 B2Robert Bosch GmbH
- Laser-assisted material phase-change and expulsion micro-machining process3 Sep 2024US 12,077,432 B2Massachusetts Institute of Technology
- Method for ablating or roughening wafer surfaces16 Apr 2024US 11,958,739 B2University of Rhode Island Board of Trustees
- Fabrication of a nanochannel for DNA sequencing using electrical plating to achieve electrode gap1 Aug 2023US 11,714,061 B2Seagate Technology LLC
- Copper-alloy capping layers for metallization in touch-panel displays2 May 2023US 11,640,222 B2Materion Newton Inc.
- Method for manufacturing member with recess structure and member with recess structure3 Jul 2025US 2025/0215319 A1AGC Inc.
- Monolithic sound transducer and environmental barrier6 Jun 2024US 2024/0187770 A1Infineon Technologies AG
- Method and device for locally removing and/or modifying a polymer material on a surface29 Sep 2022US 2022/0306461 A1Robert Bosch GmbH
- Copper-alloy capping layers for metallization in touch-panel displays29 Sep 2022US 2022/0308705 A1Materion Newton Inc.
- High-volume millimeter scale manufacturing18 Aug 2022US 2022/0259038 A1Vibrant Composites Inc.
Most cited
By later US patents
- Method for making a microstructure by surface micromachining65US 6,756,317 B2MEMX, Inc. · 2004
- Manufacturing method of silicon device17US 6,358,861 B1Mitsubishi Denki Kabushiki Kaisha · 2002
- Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants16US 6,800,210 B2Reflectivity, INC · 2004
- Method of fabricating a device having a desired non-planar surface or profile and device produced thereby12US 6,884,732 B2The Regents of the University of Michigan · 2005
- Micro corner cube array, method of making the micro corner cube array, and display device10US 7,098,137 B2Sharp Kabushiki Kaisha · 2006