Micro corner cube array, method of making the micro corner cube array, and display device
AssigneeSharp Kabushiki Kaisha
InventorsIchiro Ihara, Kiyoshi Minoura, Yutaka Sawayama
Life of this patent
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Abstract
A method of making a micro corner cube array includes the steps of: providing a substrate, at least a surface portion of which consists of cubic single crystals and which has a surface that is substantially parallel to {111} planes of the crystals; and dry-etching the surface of the substrate anisotropically with an etching gas that is reactive with the substrate, thereby forming a plurality of unit elements of the micro corner cube array on the surface of the substrate. Each of the unit elements is made up of a number of crystal planes that have been etched at a lower etch rate than the {111} planes of the crystals.
Claims16
A method of making a micro corner cube array, the method comprising the steps of:
- a) providing a substrate, at least a surface portion of which consists of cubic single crystals and which has a surface that is substantially parallel to {111} planes of the crystals;
- and
- b) dry-etching the surface of the substrate anisotropically with an etching gas that is reactive with the substrate, thereby forming a plurality of unit elements of the micro corner cube array on the surface of the substrate, each said unit element being made up of a number of crystal planes that have been etched at a lower etch rate than the {111} planes of the crystals.
Dependencies are inferred from the claim text.