Monolithic sound transducer and environmental barrier

A microphone device comprising:

• a microelectronic mechanical system (MEMS) microphone device monolithically integrated with an environmental barrier structure, further comprising:
• a substrate structure comprising a base substrate and an additional substrate material layer deposited on the base substrate;
• a micromechanical environmental barrier structure microstructured in the substrate structure, wherein the micromechanical environmental barrier structure is configured to let a first amount of air pass through while preventing a second amount of at least one of moisture, liquid, oil or solid environmental particles from passing through;
• and
• a MEMS sound transducer structure in the additional substrate material layer, wherein both the MEMS sound transducer structure and the micromechanical environmental barrier structure are monolithically integrated in the substrate structure.

A microelectronic mechanical system (MEMS) microphone device, comprising:

• a substrate structure comprising a base substrate and an additional substrate material layer deposited on the base substrate;
• a micromechanical environmental barrier structure microstructured in the substrate structure, wherein the micromechanical environmental barrier structure is configured to let a first amount of air pass through while preventing a second amount of at least one of moisture, liquid, oil or solid environmental particles from passing through;
• a MEMS sound transducer structure in the additional substrate material layer, wherein both the MEMS sound transducer structure and the micromechanical environmental barrier structure are monolithically integrated in the substrate structure;
• and
• nanofibers located on the micromechanical environmental barrier structure, wherein the nanofibers combine to form an air permeable nanofibrous membrane structure.