B81C 1/00047
Cavities
Official title: {Cavities}
B81C1/00047 (Cavities) appears on 179 US grants and 190 published applications in this corpus.
Search patents in B81C- Granted patents
- 179
- Published applications
- 190
- Assignees
- 112
- Inventors
- 374
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 2 | 0 |
| 1997 | 5 | 0 |
| 1998 | 2 | 0 |
| 1999 | 2 | 0 |
| 2000 | 4 | 0 |
| 2001 | 1 | 0 |
| 2002 | 4 | 6 |
| 2003 | 3 | 1 |
| 2004 | 3 | 8 |
| 2005 | 4 | 7 |
| 2006 | 4 | 9 |
| 2007 | 4 | 3 |
| 2008 | 3 | 2 |
| 2009 | 7 | 6 |
| 2010 | 4 | 9 |
| 2011 | 5 | 7 |
| 2012 | 6 | 10 |
| 2013 | 7 | 4 |
| 2014 | 6 | 7 |
| 2015 | 9 | 6 |
| 2016 | 5 | 8 |
| 2017 | 6 | 5 |
| 2018 | 9 | 15 |
| 2019 | 12 | 17 |
| 2020 | 16 | 16 |
| 2021 | 11 | 13 |
| 2022 | 9 | 11 |
| 2023 | 11 | 8 |
| 2024 | 7 | 7 |
| 2025 | 2 | 1 |
| 2026 | 6 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method for manufacturing a structure comprising a plurality of membranes overhanging cavities25 Aug 2026US 12,715,764 B2Commissariat A L'energie Atomique Et Aux Energies
- Method for forming semiconductor structure9 Jun 2026US 12,649,652 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Neural lattice device for characterization of neuron behavior2 Jun 2026US 12,644,085 B2International Business Machines Corporation
- Method for manufacturing a microfluidic device7 Apr 2026US 12,595,168 B2Imec Vzw
- Glass wafer and glass element for pressure sensors7 Apr 2026US 12,596,042 B2Schott AG
- Device and method for manufacturing solid fuel microthrusters using only pcb-mems technology10 Sep 2026US 2026/0264889 A1Universidad de Sevilla
- Method of manufacturing a microporous polymer structure23 Jul 2026US 2026/0209034 A1Novamem AG
- Process for the manufacturing of microscale hollow metal bodies5 Mar 2026US 2026/0060925 A1Max-Planck-Institut für Nachhaltige Materialien Gesellschaft mit beschränkter Haftung
- Sample well fabrication techniques and structures for integrated sensor devices15 Jan 2026US 2026/0020323 A1Quantum-Si Incorporated
- Micro-electromechanical system device including a precision proof mass element and methods for forming the same13 Nov 2025US 2025/0346482 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Method for forming micro cavity560US 6,342,427 B12002
- Structure having cavities and process for producing such a structure118US 5,804,086 ACommissariat A L' Energie Atomique · 1998
- Method of producing cavity structures94US 5,690,841 APharmacia Biotech AB · 1997
- Deposited thin film void-column network materials89US 6,399,177 B1The Penn State Research Foundation · 2002
- Microfabrication process for enclosed microstructures84US 6,093,330 ACornell Research Foundation, Inc. · 2000