B81B 2203/058
Rotation out of a plane parallel to the substrate
B81B2203/058 (Rotation out of a plane parallel to the substrate) appears on 321 US grants and 409 published applications in this corpus.
Search patents in B81B- Granted patents
- 321
- Published applications
- 409
- Assignees
- 186
- Inventors
- 719
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 3 | 0 |
| 2000 | 3 | 0 |
| 2001 | 5 | 4 |
| 2002 | 8 | 29 |
| 2003 | 14 | 16 |
| 2004 | 23 | 16 |
| 2005 | 11 | 13 |
| 2006 | 18 | 6 |
| 2007 | 8 | 16 |
| 2008 | 7 | 13 |
| 2009 | 9 | 7 |
| 2010 | 5 | 11 |
| 2011 | 10 | 8 |
| 2012 | 8 | 15 |
| 2013 | 12 | 10 |
| 2014 | 12 | 13 |
| 2015 | 9 | 15 |
| 2016 | 11 | 17 |
| 2017 | 10 | 12 |
| 2018 | 10 | 9 |
| 2019 | 15 | 16 |
| 2020 | 12 | 18 |
| 2021 | 12 | 24 |
| 2022 | 12 | 19 |
| 2023 | 18 | 29 |
| 2024 | 21 | 28 |
| 2025 | 21 | 26 |
| 2026 | 10 | 19 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Micro-electro-mechanical systems and preparation method thereof25 Aug 2026US 12,715,762 B2Huawei Technologies Co., Ltd.
- Micromechanical z-acceleration sensor28 Apr 2026US 12,612,302 B2Robert Bosch GmbH
- Low-impact out-of-plane motion limiter MEMS device14 Apr 2026US 12,600,620 B2Murata Manufacturing Co., Ltd.
- Low voltage electrostatic mems actuators for large angle tip, tilt, and piston beamsteering31 Mar 2026US 12,589,986 B2The United States of America as represented by the Secretary of the Air Force
- Movable device, projection apparatus, head-up display, laser headlamp, head-mounted display, and object recognition apparatus10 Mar 2026US 12,572,008 B2Ricoh Company, Ltd.
- Microelectromechanical device with recovery from stiction conditions1 Oct 2026US 2026/0296874 A1STMicroelectronics International N. V.
- Out-of-plane micro-electromechanical device with reinforced stopper and method for manufacturing a micro-electromechanical device25 Jun 2026US 2026/0176126 A1STMicroelectronics International N. V.
- Mems device and method for characterizing a mems device11 Jun 2026US 2026/0159372 A1Infineon Technologies AG
- Mems device4 Jun 2026US 2026/0152382 A1Murata Manufacturing Co., Ltd.
- High-Frequency BIAXIAL Bi-Resonant Microelectromechanical Mirror Structure4 Jun 2026US 2026/0152383 A1STMicroelectronics International N. V.
Most cited
By later US patents
- Method of forming MEMS device235US 6,861,277 B1Hewlett-Packard Development Company, L. P. · 2005
- Microelectromechanical devices including rotating plates and related methods200US 5,914,801 AMcnc · 1999
- Micromirror133US 6,749,308 B1Robert Bosch GmbH · 2004
- Multi-axis magnetically actuated device125US 6,388,789 B1The Charles Stark Draper Laboratory, Inc. · 2002
- Direct acting vertical thermal actuator with controlled bending112US 6,531,947 B13M Innovative Properties Company · 2003