B81B 2203/0361
Tips, pillars
B81B2203/0361 (Tips, pillars) appears on 224 US grants and 299 published applications in this corpus.
Search patents in B81B- Granted patents
- 224
- Published applications
- 299
- Assignees
- 174
- Inventors
- 682
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 5 | 0 |
| 1999 | 2 | 0 |
| 2000 | 2 | 0 |
| 2001 | 2 | 0 |
| 2002 | 2 | 3 |
| 2003 | 4 | 6 |
| 2004 | 3 | 6 |
| 2005 | 4 | 7 |
| 2006 | 5 | 6 |
| 2007 | 4 | 12 |
| 2008 | 3 | 7 |
| 2009 | 2 | 7 |
| 2010 | 12 | 13 |
| 2011 | 9 | 11 |
| 2012 | 5 | 18 |
| 2013 | 9 | 13 |
| 2014 | 7 | 12 |
| 2015 | 11 | 13 |
| 2016 | 13 | 14 |
| 2017 | 6 | 13 |
| 2018 | 10 | 20 |
| 2019 | 14 | 22 |
| 2020 | 17 | 11 |
| 2021 | 18 | 18 |
| 2022 | 8 | 10 |
| 2023 | 11 | 20 |
| 2024 | 10 | 8 |
| 2025 | 12 | 18 |
| 2026 | 11 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- Microelectromechanical element and a method for manufacturing it28 Jul 2026US 12,692,151 B2Murata Manufacturing Co., Ltd.
- Two-layer optical beam steering device, system, method of utilization, and method of fabrication21 Jul 2026US 12,687,714 B2Carillon Technologies Management Corporation
- Micro-electromechanical system (MEMS) structure and mems microphone comprising same14 Jul 2026US 12,679,720 B2Memsensing Microsystems (Suzhou, China) Co., Ltd.
- Hierarchical silicon nanostructures, methods of making, and methods of use12 May 2026US 12,623,901 B2University of Florida Research Foundation, Inc.
- Mems device1 Oct 2026US 2026/0296877 A1Infineon Technologies AG
- Crash fault mitigation and dust mitigation in mems cooling systems17 Sep 2026US 2026/0274650 A1Frore Systems Inc.
- Hierarchical silicon nanostructures, methods of making, and methods of use27 Aug 2026US 2026/0250125 A1
- Method for manufacturing microstructures6 Aug 2026US 2026/0231708 A1Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Crash mitigation in active mems cooling systems28 May 2026US 2026/0145930 A1Frore Systems Inc.
Most cited
By later US patents
- Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials513US 7,115,305 B2California Institute of Technology · 2006
- Support post architecture for micromechanical devices340US 6,447,126 B1Texas Instruments Incorporated · 2002
- Support post architecture for micromechanical devices283US 5,650,881 ATexas Instruments Incorporated · 1997
- Method of making a support post for a micromechanical device252US 5,784,212 ATexas Instruments Incorporated · 1998
- Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices234US 6,962,823 B2Nanosys, Inc. · 2005