Mems device

A MEMS device comprising:

• a transducer element having a first deflectable membrane structure, a rigid electrode structure and a second deflectable membrane structure in a vertically spaced configuration,
• wherein the rigid electrode structure is arranged between the first and second deflectable membrane structure, the first and second deflectable membrane structure each comprise a deflectable portion, and
• wherein the deflectable portion of the first deflectable membrane structure and the deflectable portion of the second deflectable membrane structure are mechanically coupled by means of mechanical connection elements to each other and are mechanically decoupled from the rigid electrode structure;
• a carrier element for supporting the transducer element;
• a plurality of first clamping structures for mechanically connecting the transducer element to the carrier element at edge clamping regions of the transducer element;
• an elongation structure laterally extending from unclamped edge regions of the transducer element, the elongation structure comprising a corrugation element, the transducer element being mechanically decoupled from the carrier element at the unclamped edge regions;
• and
• a plurality of second clamping structures for mechanically connecting the elongation structure to the carrier element at edge clamping regions of the elongation structure, and
• wherein the elongation structure comprises first elongation elements which extend at least partially in the same plane as the first deflectable membrane structure from the transducer element to the second clamping structures,
• or
• wherein the elongation structure comprises second elongation elements which extend at least partially in the same plane as the second deflectable membrane structure from the transducer element to the second clamping structures.

A MEMS device comprising:

• a transducer element having a first deflectable membrane structure, a rigid electrode structure and a second deflectable membrane structure in a vertically spaced configuration,
• wherein the rigid electrode structure is arranged between the first and second deflectable membrane structure, the first and second deflectable membrane structure each comprise a deflectable portion, and
• wherein the deflectable portion of the first deflectable membrane structure and the deflectable portion of the second deflectable membrane structure are mechanically coupled by means of mechanical connection elements to each other and are mechanically decoupled from the rigid electrode structure;
• a carrier element for supporting the transducer element;
• a plurality of first clamping structures for mechanically connecting the transducer element to the carrier element at edge clamping regions of the transducer element;
• an elongation structure laterally extending from unclamped edge regions of the transducer element, the elongation structure comprising a slit or a through-hole, the transducer element being mechanically decoupled from the carrier element at the unclamped edge regions;
• and
• a plurality of second clamping structures for mechanically connecting the elongation structure to the carrier element at edge clamping regions of the elongation structure, and
• wherein the elongation structure comprises first elongation elements which extend at least partially in the same plane as the first deflectable membrane structure from the transducer element to the second clamping structures,
• or
• wherein the elongation structure comprises second elongation elements which extend at least partially in the same plane as the second deflectable membrane structure from the transducer element to the second clamping structures.