B81B 2201/0221
Variable capacitors
B81B2201/0221 (Variable capacitors) appears on 94 US grants and 130 published applications in this corpus.
Search patents in B81B- Granted patents
- 94
- Published applications
- 130
- Assignees
- 59
- Inventors
- 248
- Latest grant
- 19 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2003 | 0 | 1 |
| 2004 | 0 | 0 |
| 2005 | 0 | 1 |
| 2006 | 1 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 1 |
| 2010 | 0 | 6 |
| 2011 | 1 | 6 |
| 2012 | 3 | 2 |
| 2013 | 2 | 11 |
| 2014 | 9 | 18 |
| 2015 | 6 | 15 |
| 2016 | 14 | 16 |
| 2017 | 11 | 10 |
| 2018 | 11 | 2 |
| 2019 | 10 | 8 |
| 2020 | 7 | 4 |
| 2021 | 3 | 4 |
| 2022 | 2 | 6 |
| 2023 | 2 | 9 |
| 2024 | 2 | 3 |
| 2025 | 6 | 5 |
| 2026 | 4 | 2 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Inertial sensor and method for forming the same19 May 2026US 12,631,453 B2AAC Technologies PTE.Ltd.
- Microelectromechanical systems sensor with frequency dependent input attenuator31 Mar 2026US 12,589,987 B2Knowles Electronics, LLC
- Process for manufacturing a micro-electro-mechanical device from a single semiconductor wafer and related MEMS device31 Mar 2026US 12,589,989 B2STMicroelectronics S,r.l.
- Semiconductor device3 Mar 2026US 12,565,418 B2Infineon Technologies AG
- Quadrature bias error reduction for vibrating structure gyroscopes23 Dec 2025US 12,507,595 B2Atlantic Inertial Systems Limited
- Microelectronic assemblies having air gap fiducials24 Sep 2026US 2026/0285672 A1Intel Corporation
- Mems device with recessed combs30 Apr 2026US 2026/0116738 A1Murata Manufacturing Co., Ltd.
- Fully symmetrical structures for microelectromechanical devices9 Oct 2025US 2025/0313452 A1Analog Devices, Inc.
- Constant charge or capacitance for capacitive micro-electrical-mechanical system sensors10 Jul 2025US 2025/0223156 A1InvenSense, Inc.
- Microelectromechanical motion sensor device having a single proof mass5 Jun 2025US 2025/0178885 A1STMicroelectronics International N. V.
Most cited
By later US patents
- MEMS tunable capacitor based on angular vertical comb drives47US 7,085,122 B2The Regents of the University of California · 2006
- Device containing plurality of smaller MEMS devices in place of a larger MEMS device15US 8,861,218 B2Cavendish Kinetics, Inc. · 2014
- CMOS compatible MEMS microphone and method for manufacturing the same12US 8,847,289 B2Goertek Inc. · 2014
- MEMS capacitive device and method of forming same11US 8,149,564 B2Freescale Semiconductor, Inc. · 2012
- Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same9US 7,977,136 B2Georgia Tech Research Corporation · 2011