Mems device with recessed combs

A microelectromechanical device comprising:

• a device layer having a top face and a bottom face, the device layer defining an xy-plane and a z-coordinate that is perpendicular to the xy-plane, and the top face of the device layer having a greater z-coordinate than the bottom face;
• a handle wafer that is attached to the bottom face of the device layer;
• and
• a first comb structure and a second comb structure in the device layer and interdigitated with each other, each of the first comb structure and the second comb structure having a top and a bottom,
• wherein the bottom of the first comb structure has a z-coordinate that is greater than both the z-coordinate of the bottom face of the device layer and the z-coordinate of the bottom of the second comb structure,
• wherein the top of the second comb structure has a z-coordinate that is less than both the z-coordinate of the top face of the device layer and the z-coordinate of the top of the first comb structure, and
• wherein the device layer comprises a cavity that extends from the bottom face of the device layer to the bottom of the second comb structure, and the handle wafer does not include a cavity.