B08B 2203/0288
Ultra or megasonic jets
B08B2203/0288 (Ultra or megasonic jets) appears on 136 US grants and 162 published applications in this corpus.
Search patents in B08B- Granted patents
- 136
- Published applications
- 162
- Assignees
- 91
- Inventors
- 364
- Latest grant
- 13 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 6 | 0 |
| 2000 | 3 | 0 |
| 2001 | 5 | 1 |
| 2002 | 5 | 9 |
| 2003 | 6 | 9 |
| 2004 | 6 | 15 |
| 2005 | 8 | 7 |
| 2006 | 3 | 18 |
| 2007 | 4 | 7 |
| 2008 | 5 | 8 |
| 2009 | 7 | 12 |
| 2010 | 3 | 3 |
| 2011 | 2 | 4 |
| 2012 | 6 | 3 |
| 2013 | 3 | 5 |
| 2014 | 0 | 4 |
| 2015 | 4 | 9 |
| 2016 | 3 | 7 |
| 2017 | 11 | 7 |
| 2018 | 2 | 3 |
| 2019 | 6 | 4 |
| 2020 | 3 | 6 |
| 2021 | 4 | 6 |
| 2022 | 6 | 8 |
| 2023 | 3 | 4 |
| 2024 | 8 | 2 |
| 2025 | 3 | 0 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Integrated clean and dry module for cleaning a substrate13 Jan 2026US 12,525,468 B2APPLIED Materials.Inc.
- Substrate processing apparatus8 Jul 2025US 12,350,787 B2Ebara Corporation
- Wafer cleaning apparatus24 Jun 2025US 12,341,052 B2Zeus Co., Ltd.
- Ultrasonically activated water ejector20 May 2025US 12,303,946 B2Disco Corporation
- Nozzle and liquid ejection system31 Dec 2024US 12,183,598 B2Asahi Sunac Corporation
- Integrated clean and dry module for cleaning a substrate23 Apr 2026US 2026/0114211 A1APPLIED Materials.Inc.
- Integrated clean and dry module for cleaning a substrate4 Jul 2024US 2024/0222152 A1APPLIED Materials.Inc.
- Substrate cleaning device and method of cleaning substrate14 Mar 2024US 2024/0082885 A1Ebara Corporation
- Substrate processing apparatus21 Dec 2023US 2023/0405762 A1Ebara Corporation
- Apparatus for cleaning pot-shaped hollow bodies, in particular transport containers for semiconductor wafers or for euv lithography masks14 Dec 2023US 2023/0402298 A1Pace-Tec GmbH
Most cited
By later US patents
- Double-sided substrate cleaning apparatus160US 5,518,542 ATokyo Electron Kyushu Limited · 1996
- Megasonic jet cleaner apparatus134US 4,326,553 ARCA Corporation · 1982
- Liquid feed nozzle, wet treatment, apparatus and wet treatment method91US 6,230,722 B1Alps Electric Co., Ltd. · 2001
- Apparatus for and method of cleaning substrate87US 5,975,098 ADainippon Screen Mfg.Co., Ltd. · 1999
- Method of and apparatus for cleaning workpiece76US 5,868,866 AEbara Corporation · 1999