US 12,525,468 B2Granted

Integrated clean and dry module for cleaning a substrate

AssigneeApplied Materials, Inc.

InventorsJason A. Rye, Adrian S. Blank, Ekaterina Mikhaylichenko, Jagan Rangarajan, Jagadeeshkumar Sukumaran, Manikandan Jayaraman, Ricardo Martinez, Retheesh Muralidharan

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Abstract

In one embodiment, a cleaning and drying module includes a process rotor having grip pins for holding a substrate. The process rotor rotates and moves between lowered and raised positions. A plurality of sweep arms each have a nozzle mechanism to apply a cleaning and/or drying fluid to the substrate. A collection rotor rotates synchronously with the process rotor. The collection rotor includes a collection weir defined by a bottom portion of the collection rotor and the inner surface. The collection weir collects fluids and particles from the process rotor and the substrate. Drain holes are positioned in the collection weir to drain fluids and particles from the collection weir. A rotor cover surrounds and extends above the sidewall of the collection rotor defining an annular volume between the rotor cover and the collection rotor. An exhaust draws air through the drain holes and receives the collected fluids and particles.

Claims16

Dependent claims

A cleaning and drying module comprising:

a process rotor having a plurality of grip pins configured to releasably hold a substrate, the process rotor being configured to rotate and to move between a lowered position and a raised position;
a plurality of sweep arms, each sweep arm having a nozzle mechanism configured to apply a fluid to the substrate;
a collection rotor configured to rotate synchronously with the process rotor and defining a processing volume between the process rotor and an interior of the collection rotor, the collection rotor comprising:
a sidewall extending above the process rotor in the lowered position, an inner surface of the sidewall being angled inward from a lower portion to an upper portion,
a plurality of drain holes positioned proximate the lower portion of the inner surface of the sidewall, the drain holes configured to drain fluid from the processing volume;
and
a rotor extension extending diagonally downward and outward from a lower end of the sidewall, the rotor extension positioned proximate the drain holes;
an annular collection weir formed below an outer portion of the collection rotor, the annular collection weir being configured to collect fluid from the drain holes, wherein the rotor extension extends into the annular collection weir;
a rotor cover surrounding and extending above the sidewall of the collection rotor defining an annular volume between the rotor cover and the collection rotor, the plurality of grip pins of the process rotor extending above the rotor cover when positioned in the raised position;
and
an exhaust in communication with the annular collection weir, the exhaust configured to draw air from the processing volume and the annular volume through the drain holes and to receive the collected fluid from the annular collection weir.

8 more elements

A cleaning and drying module comprising:

a process rotor having a plurality of grip pins configured to releasably hold a substrate, the process rotor being configured to rotate and to move between a lowered position and a raised position;
at least one sweep arm having a nozzle mechanism configured to apply a fluid to the substrate;
a collection rotor configured to rotate synchronously with the process rotor and defining a processing volume between the process rotor and an interior of the collection rotor, the collection rotor comprising:
a sidewall extending above the process rotor in the lowered position, an inner surface of the sidewall being angled inward from a lower portion to an upper portion,
a plurality of drain holes positioned proximate the lower portion of the inner surface of the sidewall, the drain holes configured to drain fluids and particles from the processing volume;
and
a rotor extension extending diagonally downward and outward from a lower end of the sidewall, the rotor extension positioned proximate the drain holes;
an annular collection weir formed below an outer portion of the collection rotor, the annular collection weir being configured to collect the fluid and particles from the drain holes, wherein the rotor extension extends into the annular collection weir;
a rotor cover surrounding and extending above the sidewall of the collection rotor defining an annular volume between the rotor cover and the collection rotor, the plurality of grip pins of the process rotor extending above the rotor cover when positioned in the raised position;
an exhaust in communication with the annular collection weir, the exhaust configured to draw air from the processing volume and the annular volume through the drain holes and to receive the collected fluid and particles from the annular collection weir;
and
an enclosure covering the process rotor, the collection rotor, the rotor cover and the sweep arms, the enclosure comprising:
a first door on a first side of the enclosure, and
a second door on a second side of the enclosure different from the first side.

11 more elements

Dependencies are inferred from the claim text.

Facts

Application: 18/101,555Filed 25 Jan 2023 · us provisional application
Priority: 30 Dec 2022
Published: US 2024/0222152 A14 Jul 2024
Granted: 13 Jan 2026
Term ends: Not estimatedThe source records don’t support an estimate.

Classification10 codes

H10P 72/0406
Apparatus for fluid treatment: for cleaning followed by drying, rinsing, stripping, blasting or the like
B08B 3/022
Cleaning by the force of jets or sprays: cleaning travelling work
B08B 3/123
By sonic or ultrasonic vibrations: cleaning travelling work, e.g. webs, articles on a conveyor
B08B 13/00
Accessories or details of general applicability for machines or apparatus for cleaning