Y10S 148/093
Laser beam treatment in general
Y10S148/093 (Laser beam treatment in general) appears on 191 US grants and 7 published applications in this corpus.
Search patents in Y10S- Granted patents
- 191
- Published applications
- 7
- Assignees
- 86
- Inventors
- 353
- Latest grant
- 12 May 2015
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 2 | 0 |
| 1978 | 2 | 0 |
| 1979 | 8 | 0 |
| 1980 | 19 | 0 |
| 1981 | 13 | 0 |
| 1982 | 10 | 0 |
| 1983 | 12 | 0 |
| 1984 | 10 | 0 |
| 1985 | 6 | 0 |
| 1986 | 7 | 0 |
| 1987 | 15 | 0 |
| 1988 | 9 | 0 |
| 1989 | 11 | 0 |
| 1990 | 4 | 0 |
| 1991 | 6 | 0 |
| 1992 | 11 | 0 |
| 1993 | 3 | 0 |
| 1994 | 8 | 0 |
| 1995 | 2 | 0 |
| 1996 | 4 | 0 |
| 1997 | 4 | 0 |
| 1998 | 8 | 0 |
| 1999 | 6 | 0 |
| 2000 | 1 | 0 |
| 2001 | 3 | 1 |
| 2002 | 4 | 3 |
| 2003 | 0 | 1 |
| 2004 | 0 | 1 |
| 2005 | 1 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 1 |
| 2014 | 0 | 0 |
| 2015 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Apparatus and methods for rapid thermal processing12 May 2015US 9,029,739 B2APPLIED Materials.Inc.
- Semiconductor device method of manufacturing13 Dec 2005US 6,974,732 B2Semiconductor Energy Laboratory Co.Ltd.
- Method of manufacturing a semiconductor device3 Dec 2002US 6,489,222 B2Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and fabricating method thereof13 Aug 2002US 6,432,756 B1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device12 Mar 2002US 6,355,941 B1Semiconductor Energy Laboratory Co.Ltd.
- Apparatus and methods for rapid thermal processing5 Dec 2013US 2013/0323936 A1Lawrence Livermore National Security, LLC
- Semiconductor device and fabricating method thereof25 Mar 2004US 2004/0058486 A1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and fabricating method thereof16 Jan 2003US 2003/0010982 A1Semiconductor Energy Laboratory Co.Ltd.
- Method and apparatus for treating the internal surface of a gas bottle12 Sep 2002US 2002/0125257 A1
- Semiconductor device and fabricating method thereof21 Feb 2002US 2002/0022350 A1Semiconductor Energy Laboratory Co.Ltd.
Most cited
By later US patents
- Method for producing semiconductor device280US 5,712,191 ASemiconductor Energy Laboratory Co.Ltd. · 1998
- Laser processing method of semiconductor device using a catalyst221US 5,756,364 ASemiconductor Energy Laboratory Co.Ltd. · 1998
- Method of crystallizing amorphous material with a moving energy beam218US 4,309,225 AMassachusetts Institute of Technology · 1982
- Method of crystallizing a semiconductor thin film216US 5,145,808 ASony Corporation · 1992
- Method of forming polycrystalline silicon layer on substrate by large area excimer laser irradiation201US 5,529,951 ASony Corporation · 1996