H10N 60/0688
Etching
Official title: {Etching}
H10N60/0688 (Etching) appears on 58 US grants and 38 published applications in this corpus.
Search patents in H10N- Granted patents
- 58
- Published applications
- 38
- Assignees
- 59
- Inventors
- 170
- Latest grant
- 14 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 2 | 0 |
| 1990 | 5 | 0 |
| 1991 | 3 | 0 |
| 1992 | 1 | 0 |
| 1993 | 4 | 0 |
| 1994 | 2 | 0 |
| 1995 | 3 | 0 |
| 1996 | 0 | 0 |
| 1997 | 3 | 0 |
| 1998 | 1 | 0 |
| 1999 | 3 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 1 |
| 2006 | 0 | 0 |
| 2007 | 0 | 3 |
| 2008 | 1 | 1 |
| 2009 | 1 | 0 |
| 2010 | 1 | 1 |
| 2011 | 0 | 0 |
| 2012 | 0 | 2 |
| 2013 | 1 | 0 |
| 2014 | 2 | 0 |
| 2015 | 0 | 1 |
| 2016 | 0 | 5 |
| 2017 | 5 | 2 |
| 2018 | 1 | 3 |
| 2019 | 3 | 2 |
| 2020 | 2 | 2 |
| 2021 | 3 | 5 |
| 2022 | 3 | 0 |
| 2023 | 2 | 5 |
| 2024 | 0 | 1 |
| 2025 | 0 | 1 |
| 2026 | 4 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method of making a superconducting nanowire single photon detector using a sidewall image transfer process14 Jul 2026US 12,685,032 B1Psiquantum, Corp.
- A-axis Josephson junctions with improved smoothness30 Jun 2026US 12,672,488 B2Ambature, Inc.
- Method for making a quantum device7 Apr 2026US 12,596,948 B2Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Vertical transmon structure and its fabrication process20 Jan 2026US 12,532,670 B2International Business Machines Corporation
- Second generation high-temperature superconducting (2G-HTS) tape and fabrication method thereof12 Dec 2023US 11,844,289 B2Shanghai Jiaotong University
- Preparation Method for Quantum Chip, Quantum Chip, and Quantum Computer8 Oct 2026US 2026/0311019 A1Tencent Technology (Shenzhen) Company Limited
- A-Axis Josephson Junctions with Improved Smoothness30 Jul 2026US 2026/0223603 A1Ambature, Inc.
- Tape comprising superconducting elements distributed longitudinally12 Feb 2026US 2026/0047350 A1Subra A/S
- Plurality of superconducting filaments23 Oct 2025US 2025/0329480 A1Subra A/S
- Superconducting quantum chip structure and fabrication method for superconducting quantum chip1 Feb 2024US 2024/0037438 A1Origin Quantum Computing Technology Co., Ltd.
Most cited
By later US patents
- Laser scribing system and method85US 4,861,964 ASemiconductor Energy Laboratory Co.Ltd. · 1989
- Laser scribing method31US 4,865,686 ASemiconductor Energy Laboratory Co.Ltd. · 1989
- Electric circuit having superconducting multilayered structure and manufacturing method for same24US 4,960,751 ASemiconductor Energy Laboratory Co.Ltd. · 1990
- Method for producing a layer-like composition of oxide-ceramic superconducting material18US 4,916,114 ASiemens Aktiengesellschaft · 1990
- Formation of superconducting devices using a selective etching technique18US 5,952,269 AThe Trustees of Columbia University in the City of New York · 1999