Method for making a quantum device
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsCyrille Le Royer, François Lefloch, Fabrice Nemouchi, Nicolas Posseme
Life of this patent
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Abstract
A method for producing a quantum device comprising forming a superconductive layer, forming a mask on the superconductive layer, the mask comprising masking patterns and at least two openings alternately in a direction, the at least two openings) being separated from one another by a separation distance, and further each having a width, such as the separation distance and the width are less than a coherence length of a Cooper pair in said superconductive material, and modifying, through the at least two openings, of the exposed portions of the superconductive layer, so as to form at least two barriers of width di separating the superconductive regions.
Claims18
A method for producing a quantum device, the method comprising:
- forming, on a substrate, a superconductive layer made of a superconductive material, said superconductive layer having a face extending mainly along a basal plane, forming a mask on the superconductive layer, said mask comprising masking patterns and at least two openings separated by a masking pattern and disposed alternately in a direction of the plane, said at least two openings exposing respectively at least two portions of the superconductive layer and being separated from one another in said direction by a separation distance, said at least two openings further each having a width di (i=1 . . . n+1) in said direction, the separation distance and the width di being less than a coherence length of a Cooper pair in said superconductive material, and
- modifying, through said at least two openings, the superconductive material within the at least two exposed portions of the superconductive layer, so as to transform the superconductive material within the at least two exposed portions into non-superconductive material, and form at least two barriers of the width di, each barrier separating two superconductive regions of the superconductive layer.
Dependencies are inferred from the claim text.