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US 12,685,032 B1Granted
Method of making a superconducting nanowire single photon detector using a sidewall image transfer process
AssigneePsiquantum, Corp.
InventorsNicholas Licausi, Vimal Kamineni
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Abstract
An embodiment method of manufacturing a superconducting nanowire includes forming a multilayer thin film stack including a superconducting layer, forming a mandrel over the multilayer thin film stack, forming an etch mask including a first mask portion on a first side of the mandrel and a second mask portion on a second side of the mandrel, removing the mandrel, and etching the multilayer thin film stack using the etch mask to thereby form a superconducting nanowire.
Claims20
A method of manufacturing a superconducting nanowire, comprising:
- forming a multilayer thin film stack comprising a superconducting layer;
- forming a mandrel over the multilayer thin film stack;
- forming an etch mask comprising a first mask portion on a first side of the mandrel and a second mask portion on a second side of the mandrel;
- removing the mandrel;
- and
- etching the multilayer thin film stack using the etch mask to thereby form the superconducting nanowire.
3 more elements
Dependencies are inferred from the claim text.