Method for producing a layer-like composition of oxide-ceramic superconducting material
AssigneeSiemens Aktiengesellschaft
InventorEckhardt Hoenig
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AssigneeSiemens Aktiengesellschaft
InventorEckhardt Hoenig
Estimating the term…
With the method a layer-like composition of an oxide-ceramic superconducting material with a high transition temperature and great current carrying capacity on the basis of a materials system containing metallic components and oxygen can be prepared. The method is to be improved in the direction that layers with great current-carrying capacity can be formed also on non-monocrystalline substrates. It is provided for this purpose that a multi-layer layer of the superconductive material is applied on a fine-crystalline substrate by first making successive layers of individual films with a respective film thickness under 10 nm, and then this multilayer structure is converted into the desired superconducting phase by means of supplying oxygen and at a temperature below 400.degree. C. For developing each individual film, the metallic components of the system are applied to the substrate that may be available, by means of a physical deposition process and while oxygen is being supplied, at a temperature below 400.degree. C., and by means of short thermal pulses a column structure is generated which comprises columns tightly packed with c-axes at least approximately perpendicular to the respective underlayer.
A method for manufacturing a layer-like composition of an oxide-ceramic superconductive material with a high transition temperature and large current-carrying capacity on the basis of a material system containing metallic components and oxygen, in which method the metallic components of the system are applied in a physical deposition process and while oxygen is supplied on a predetermined substrate as a preliminary product with a structure which still is disordered with respect to the superconducting metal oxide phase to be formed, which structure is converted, using a heat treatment and while oxygen continues to be supplied, into the desired superconducting oxide phase, the method comprising the steps of applying a multilayer layer of the superconducting material on a fine-crystalline substrate the steps of applying comprising first, forming successive layers of individual films with a respective film thickness under 10 nm, the step of forming each of these films comprising the steps of:
Dependencies are inferred from the claim text.