Electric circuit having superconducting multilayered structure and manufacturing method for same
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShumpei Yamazaki
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Abstract
An electric circuit is provided on a semiconductor substrate with a superconducting film. The surfaces being in contact with the superconducting film are made of heat-resistant non-oxide insulating materials so that the performance of the superconducting film is not degraded.
Claims5
A superconducting pattern formed on a substrate coated with an insulating film made of an oxide, characterized in that said pattern is made of a copper oxide superconducting ceramic comprising rare earth and alkaline earth elements and that said pattern is prevented by an intervening non-oxide film, selected from the group comprising silicon nitride, aluminum nitride, titantium nitride, silicon carbide, titanium carbide, diamond-like carbon and diamond from being in direct contact with said insulating film.
Dependencies are inferred from the claim text.