H05H 1/0006
Investigating plasma
Official title: {Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature}
H05H1/0006 (Investigating plasma) appears on 263 US grants and 230 published applications in this corpus.
Search patents in H05H- Granted patents
- 263
- Published applications
- 230
- Assignees
- 183
- Inventors
- 762
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 2 | 0 |
| 1986 | 3 | 0 |
| 1987 | 2 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 4 | 0 |
| 1992 | 4 | 0 |
| 1993 | 2 | 0 |
| 1994 | 3 | 0 |
| 1995 | 9 | 0 |
| 1996 | 8 | 0 |
| 1997 | 3 | 0 |
| 1998 | 6 | 0 |
| 1999 | 3 | 0 |
| 2000 | 4 | 0 |
| 2001 | 1 | 1 |
| 2002 | 8 | 5 |
| 2003 | 7 | 8 |
| 2004 | 7 | 5 |
| 2005 | 5 | 4 |
| 2006 | 5 | 5 |
| 2007 | 3 | 8 |
| 2008 | 4 | 8 |
| 2009 | 5 | 11 |
| 2010 | 10 | 11 |
| 2011 | 7 | 4 |
| 2012 | 4 | 12 |
| 2013 | 5 | 5 |
| 2014 | 12 | 7 |
| 2015 | 8 | 10 |
| 2016 | 8 | 9 |
| 2017 | 6 | 9 |
| 2018 | 6 | 13 |
| 2019 | 16 | 11 |
| 2020 | 12 | 22 |
| 2021 | 13 | 10 |
| 2022 | 11 | 12 |
| 2023 | 6 | 12 |
| 2024 | 14 | 15 |
| 2025 | 12 | 8 |
| 2026 | 5 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Data collection system, data collection apparatus, data collection method, and data collection program11 Aug 2026US 12,707,926 B2Tokyo Electron Limited
- Low-k RF rod for RF bias power delivery14 Jul 2026US 12,684,680 B2APPLIED Materials.Inc.
- Plasma control for spark optical emission spectroscopy5 May 2026US 12,621,920 B2FEI Company
- Plasma torch device component monitoring21 Apr 2026US 12,610,448 B2Edwards Limited
- Laser-sustained plasma generation in supersonic gas jets27 Jan 2026US 12,538,408 B2KLA Corporation
- Apparatus for Controlling a Composition of a Plasma20 Aug 2026US 2026/0247517 A1The University of Liverpool
- Radical Sensing for Process Tool Diagnostics30 Jul 2026US 2026/0221402 A1MKS Instruments, Inc.
- Method and device for recognizing a process state of a plasma arc method5 Mar 2026US 2026/0068025 A1
- Multiple Plasma Ion Source for Inline Secondary Ion Mass Spectrometry22 Jan 2026US 2026/0025902 A1APPLIED Materials.Inc.
- Low-k rf rod for rf bias power delivery8 Jan 2026US 2026/0013029 A1APPLIED Materials.Inc.
Most cited
By later US patents
- Fiber optic linked flame sensor206US 5,828,797 AMeggitt Avionics, Inc. · 1998
- Industrial material processing electron linear accelerator105US 5,401,973 AAtomic Energy of Canada Limited · 1995
- Systems and methods for calibrating a switched mode ion energy distribution system102US 9,210,790 B2Advanced Energy Industries, Inc. · 2015
- Harmonic derived arc detector92US 7,728,602 B2MKS Instruments, Inc. · 2010
- Pneumatic energy fluxmeter83US 5,159,267 ASematech, Inc. · 1992