Low-k RF rod for RF bias power delivery

An apparatus, comprising:

• a chamber;
• a chuck within the chamber;
• and
• a rod assembly electrically coupled to the chuck, wherein the rod assembly comprises:
• a first electrical conductor;
• a first insulator over the first electrical conductor;
• a second electrical conductor around the first insulator;
• a second insulator over the second electrical conductor;
• and
• a housing around the second insulator, wherein at least a portion of the housing is spaced away from the second insulator by an air gap.

An apparatus, comprising:

• an inner rod assembly, wherein the inner rod assembly comprises:
• a first rod;
• a second rod;
• and
• a bridge electrically coupled to the first rod and the second rod, wherein the inner rod assembly has an L-shape;
• a first insulator over an outer surface of the inner rod assembly;
• a shell around the inner rod assembly, wherein an inner surface of the shell directly contacts the first insulator:
• a second insulator over an outer surface of the shell;
• an insulating corner reinforcement around the bridge, wherein the insulating corner reinforcement wraps around the shell;
• and
• a housing surrounding the shell, wherein a portion of an interior surface of the housing is spaced away from the second insulator by an air gap.