Laser-sustained plasma generation in supersonic gas jets

A broadband light source comprising:

• a gas containment structure;
• one or more jet nozzles, wherein the one or more jet nozzles are configured to generate one or more supersonic gas jets;
• a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed by a supersonic gas expansion of the one or more supersonic gas jets;
• a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region formed by the supersonic gas expansion of the one or more supersonic gas jets,
• wherein the primary pump beam and the pulsed-assisting beam are configured to sustain a plasma within the localized high-pressure region;
• and
• a light collector element configured to collect at least a portion of broadband light emitted from the plasma.

A system comprising:

• a broadband source comprising:
• a gas containment structure;
• a plurality of jet nozzles, wherein the plurality of jet nozzles are configured to generate a plurality of supersonic gas jets and direct the plurality of supersonic gas jets to collide within the gas containment structure to form a localized high-pressure region at a collision point of the plurality of supersonic gas jets;
• a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed at a collision point of the plurality of supersonic gas jets;
• a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region at the collision point of the plurality of supersonic gas jets,
• wherein the primary pump beam and the pulsed-assisting beam are configured to sustain a plasma within the localized high-pressure region;
• and
• a light collector element configured to collect at least a portion of broadband light emitted from the plasma;
• a set of illuminator optics configured to direct the broadband light from the light collector element to one or more samples;
• a detector assembly;
• and
• a set of projection optics configured to receive illumination from a surface of the one or more samples and direct the illumination from the one or more samples to the detector assembly.

A system comprising:

• a broadband source comprising:
• a gas containment structure;
• one or more jet nozzles, wherein the one or more jet nozzles are configured to generate one or more supersonic gas jets;
• a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed by a supersonic gas expansion of the one or more supersonic gas jets;
• a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region formed by the supersonic gas expansion of the one or more supersonic gas jets,
• wherein the primary pump beam and the pulsed-assisting beam are configured to sustain a plasma within the localized high-pressure region;
• and
• a light collector element configured to collect at least a portion of broadband light emitted from the plasma;
• a set of illuminator optics configured to direct the broadband light from the light collector element to one or more samples;
• a detector assembly;
• and
• a set of projection optics configured to receive illumination from a surface of the one or more samples and direct the illumination from the one or more samples to the detector assembly.

A method comprising:

• generating one or more supersonic gas jets to form a localized high-pressure region;
• generating a primary pump beam and directing the primary pump beam into the localized high-pressure region formed by the one or more supersonic gas jets;
• generating a pulsed-assisting beam and directing the pulsed-assisting beam into the localized high-pressure region formed by the one or more supersonic gas jets, wherein the primary pump beam and the pulsed-assisting beam sustain a plasma within the localized high-pressure region;
• and
• collecting at least a portion of broadband light emitted from the plasma.