H03H 3/0073
Integration with other electronic structures
Official title: {Integration with other electronic structures}
H03H3/0073 (Integration with other electronic structures) appears on 84 US grants and 82 published applications in this corpus.
Search patents in H03H- Granted patents
- 84
- Published applications
- 82
- Assignees
- 57
- Inventors
- 188
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2001 | 1 | 1 |
| 2002 | 1 | 0 |
| 2003 | 0 | 1 |
| 2004 | 0 | 0 |
| 2005 | 0 | 1 |
| 2006 | 0 | 0 |
| 2007 | 0 | 2 |
| 2008 | 0 | 6 |
| 2009 | 2 | 3 |
| 2010 | 2 | 6 |
| 2011 | 7 | 5 |
| 2012 | 5 | 5 |
| 2013 | 5 | 1 |
| 2014 | 7 | 4 |
| 2015 | 4 | 4 |
| 2016 | 1 | 8 |
| 2017 | 4 | 4 |
| 2018 | 3 | 2 |
| 2019 | 4 | 5 |
| 2020 | 9 | 7 |
| 2021 | 3 | 2 |
| 2022 | 7 | 1 |
| 2023 | 8 | 9 |
| 2024 | 5 | 1 |
| 2025 | 3 | 3 |
| 2026 | 3 | 1 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Temperature stable MEMS resonator8 Sep 2026US 12,732,155 B1SiTime Corporation
- Package comprising an acoustic device and a cap substrate comprising an inductor10 Feb 2026US 12,549,154 B2RF360 Singapore Pte. Ltd.
- MEMS resonator9 Dec 2025US 12,492,120 B2SiTime Corporation
- Integrated MEMS resonator and method7 Oct 2025US 12,439,826 B2Intel Corporation
- MEMS Resonator13 Aug 2026US 2026/0233990 A1SiTime Corporation
- Mems resonator24 Apr 2025US 2025/0128937 A1SiTime Corporation
- Metal ribs in electromechanical devices20 Mar 2025US 2025/0096768 A1
- Electronic package structure20 Mar 2025US 2025/0096774 A1Advanced Semiconductor Engineering, Inc.
- Mems resonator and mems resonator processing method9 May 2024US 2024/0154598 A1
Most cited
By later US patents
- Encapsulated MEMS band-pass filter for integrated circuits52US 6,275,122 B1International Business Machines Corporation · 2001
- Method for constructing an encapsulated MEMS band-pass filter for integrated circuits52US 6,429,755 B2International Business Machines Corporation · 2002
- Method for fabricating a microelectromechanical system (MEMS) resonator26US 8,234,774 B2SiTime Corporation · 2012
- Apparatus and methods for photonic integrated resonant accelerometer19US 9,927,458 B2Massachusetts Institute of Technology · 2018
- Integrated MEMS device and method of use16US 8,567,246 B2InvenSense, Inc. · 2013