H03H 3/0072
Of microelectro-mechanical resonators or networks
Official title: {of microelectro-mechanical resonators or networks (micromembranes or microbeams B81B2203/01; manufacture of microstructural devices in general B81C)}
H03H3/0072 (Of microelectro-mechanical resonators or networks) appears on 506 US grants and 511 published applications in this corpus.
Search patents in H03H- Granted patents
- 506
- Published applications
- 511
- Assignees
- 193
- Inventors
- 789
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 5 | 8 |
| 2002 | 9 | 13 |
| 2003 | 11 | 15 |
| 2004 | 13 | 12 |
| 2005 | 11 | 17 |
| 2006 | 10 | 18 |
| 2007 | 14 | 30 |
| 2008 | 13 | 15 |
| 2009 | 26 | 24 |
| 2010 | 23 | 31 |
| 2011 | 32 | 27 |
| 2012 | 22 | 31 |
| 2013 | 23 | 20 |
| 2014 | 35 | 28 |
| 2015 | 23 | 20 |
| 2016 | 20 | 20 |
| 2017 | 20 | 27 |
| 2018 | 19 | 20 |
| 2019 | 26 | 21 |
| 2020 | 38 | 32 |
| 2021 | 14 | 13 |
| 2022 | 23 | 12 |
| 2023 | 27 | 26 |
| 2024 | 15 | 12 |
| 2025 | 12 | 14 |
| 2026 | 19 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Resonance device and manufacturing method for the same6 Oct 2026US 12,756,371 B2Murata Manufacturing Co., Ltd.
- Temperature stable MEMS resonator8 Sep 2026US 12,732,155 B1SiTime Corporation
- Resonator electrode shields8 Sep 2026US 12,732,160 B1SiTime Corporation
- Three dimensional stacked microstructures for use in gyroscopes and other devices1 Sep 2026US 12,723,874 B2The Regents of the University of Michigan
- Temperature-stable mems resonator1 Oct 2026US 2026/0303057 A1KYOCERA Technologies Oy
- MEMS Resonator13 Aug 2026US 2026/0233990 A1SiTime Corporation
- Slanted resonator13 Aug 2026US 2026/0238179 A1KYOCERA Technologies Oy
- Method for manufacturing an electronic device11 Jun 2026US 2026/0159381 A1Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- MEMS Resonator9 Apr 2026US 2026/0100692 A1SiTime Corporation
Most cited
By later US patents
- Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same268US 8,264,291 B2Sony Corporation · 2012
- Method for manufacturing a vibrating MEMS circuit263US 9,369,105 B1RF Micro Devices, Inc. · 2016
- Pattern-aligned carbon nanotube growth and tunable resonator apparatus261US 6,803,840 B2California Institute of Technology · 2004
- Process for making microstructures and microstructures made thereby196US 6,232,150 B1The Regents of the University of Michigan · 2001
- Guided wave devices with embedded electrodes and non-embedded electrodes171US 10,211,806 B2Qorvo US, Inc. · 2019