H03H 3/0075
Arrangements or methods specially adapted for testing microelecro-mechanical resonators or networks
Official title: {Arrangements or methods specially adapted for testing microelecro-mechanical resonators or networks}
H03H3/0075 (Arrangements or methods specially adapted for testing microelecro-mechanical resonators or networks) appears on 6 US grants and 5 published applications in this corpus.
Search patents in H03H- Granted patents
- 6
- Published applications
- 5
- Assignees
- 6
- Inventors
- 19
- Latest grant
- 1 Sep 2020
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 0 | 1 |
| 2003 | 0 | 0 |
| 2004 | 1 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 1 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 1 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 1 |
| 2019 | 0 | 2 |
| 2020 | 3 | 0 |
By publication year.
Recent patents
- Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators1 Sep 2020US 10,763,817 B2
- Bulk mode microelectromechanical resonator devices and methods11 Aug 2020US 10,742,191 B2MEMS-Vision International Inc.
- Drive mode and sense mode resonance frequency matching21 Jan 2020US 10,538,427 B2InvenSense, Inc.
- Methods of testing packaged thin-film piezoelectric-on-semiconductor microelectromechanical resonators having hermetic seals28 Jan 2014US 8,638,178 B1Integrated Device Technology, Inc.
- High frequency device, power supply device and communication apparatus22 Feb 2011US 7,893,796 B2Sony Corporation
- Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic mems resonators26 Sep 2019US 2019/0296711 A1
- Drive mode and sense mode resonance frequency matching21 Feb 2019US 2019/0055116 A1InvenSense, Inc.
- Bulk mode microelectromechanical resonator devices and methods2 Aug 2018US 2018/0219529 A1MEMS-Vision International Inc.
- High Frequency Device, Power Supply Device and Communication Apparatus6 Nov 2008US 2008/0272749 A1Sony Corporation
- Frequency sensitivity analysis and optimum design for MEMS resonator19 Dec 2002US 2002/0190607 A1The Regents of the University of California
Most cited
By later US patents
- Frequency sensitivity analysis and optimum design for MEMS resonator23US 6,744,174 B2The Regents of the University of California · 2004
- Methods of testing packaged thin-film piezoelectric-on-semiconductor microelectromechanical resonators having hermetic seals8US 8,638,178 B1Integrated Device Technology, Inc. · 2014
- Bulk mode microelectromechanical resonator devices and methods1US 10,742,191 B2MEMS-Vision International Inc. · 2020