US 10,763,817 B2 · Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators

Abstract

A method of an open loop characterization of an electrostatic MEMS based resonator with a varying gap, the method including: converting, via a trans-impedance amplifier circuit, an output current signal of the resonator into a voltage; multiplying the output current signal converted into the voltage, by means of a multiplier circuit, with an AC signal or with a different signal at a frequency of the resonator and carrying a second harmonic signal to a main tone; and measuring a frequency response of a signal cleared of frequencies apart from the main tone using a network analyzer.

Claims2

Dependent claims

A method of an open loop characterization of an electrostatic MEMS based resonator with a varying gap, the method comprising:

converting, via a trans-impedance amplifier circuit, an output current signal of the resonator into a voltage;
multiplying the output current signal converted into-the voltage, by means of a multiplier circuit, with an AC signal or with a different signal at a frequency of the resonator and carrying a second harmonic signal to a main tone;
and
measuring a frequency response of a signal cleared of frequencies apart from the main tone using a network analyzer.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

16/338,696Filed 12 Oct 2017

Priority

TR a 2016 1487120 Oct 2016

Published

US 2019/0296711 A126 Sep 2019

Granted

1 Sep 2020

Term ends

Not estimatedThe source records don’t support an estimate.

Classification13 codes

H03H 9/02259
Of microelectro-mechanical resonators: driving or detection means
H03H 9/02393
Of microelectro-mechanical resonators: post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
H01P 7/00
Resonators of the waveguide type
H03H 3/0075
Of microelectro-mechanical resonators or networks: arrangements or methods specially adapted for testing microelecro-mechanical resonators or networks

Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators

Life of this patent

Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators

Life of this patent

Abstract

Claims2