Bulk mode microelectromechanical resonator devices and methods

A resonator array comprising:

• a substrate;
• and
• a plurality of microelectromechanical systems (MEMS) resonators formed upon the substrate;
• wherein
• each MEMS resonator comprises:
• a central disk capable of vibrating in a “wine-glass” mode;
• a layer formed across predetermined regions of the central disk formed from a piezoelectric material;
• a metallization layer formed upon the layer;
• and
• a plurality of N supports, each support coupled between the central disk and layer at one end and the substrate upon which the MEMS resonator is disposed;
• wherein
• each MEMS resonator exhibits bulk mode resonance with transverse piezoelectric actuation of the layer;
• and
• said each MEMS resonator exhibits its bulk mode resonance at a different predetermined resonant frequency;
• the metallization layer is divided into N segments of predetermined dimensions around a periphery of the central disk, each segment is disposed between a pair of the plurality of N supports and is capacitively coupled to a tuning electrode disposed adjacent that portion of the central disk and separated by a predetermined gap;
• each metallization layer segment is electrically coupled to a predetermined electrode of a plurality of electrodes upon the substrate via electrical traces upon the plurality of supports;
• the central disk is electrically connected to ground via the central disk and the plurality of N supports;
• a first predetermined subset of the plurality of electrodes are input signal pads;
• and
• a second predetermined subset of the plurality of electrodes are output signal pads.

A microelectromechanical systems (MEMS) resonator comprising:

• a central disk;
• a layer formed across predetermined regions of the central disk formed from a piezoelectric material;
• a metallization layer formed upon the layer;
• and
• a plurality of N supports, each support coupled between the central disk and layer at one end and a substrate upon which the MEMS resonator is disposed;
• wherein
• the resonator exhibits bulk mode resonance with transverse piezoelectric actuation of the layer;
• the metallization layer upon the top surface of the central disk is divide into N segments of predetermined dimensions around the periphery of the disk, each segment is disposed between a pair of the plurality of N supports and is capacitively coupled to a tuning electrode disposed adjacent that portion of the central disk and separated by a predetermined gap;
• each metallization layer segment is electrically coupled to a predetermined electrode of a plurality of electrodes upon the substrate via electrical traces upon the plurality of supports;
• the central disk is electrically connected to ground via the central disk and the plurality of N supports;
• a first predetermined subset of the plurality of electrodes are input signal pads;
• and
• a second predetermined subset of the plurality of electrodes are output signal pads.