H03H 2003/027
The resonators or networks being of the microelectro-mechanical [mems] type
Official title: {the resonators or networks being of the microelectro-mechanical [MEMS] type}
H03H2003/027 (The resonators or networks being of the microelectro-mechanical [mems] type) appears on 150 US grants and 167 published applications in this corpus.
Search patents in H03H- Granted patents
- 150
- Published applications
- 167
- Assignees
- 71
- Inventors
- 265
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2003 | 0 | 1 |
| 2004 | 1 | 5 |
| 2005 | 3 | 3 |
| 2006 | 1 | 3 |
| 2007 | 3 | 2 |
| 2008 | 1 | 1 |
| 2009 | 2 | 3 |
| 2010 | 3 | 4 |
| 2011 | 2 | 2 |
| 2012 | 1 | 5 |
| 2013 | 1 | 8 |
| 2014 | 5 | 5 |
| 2015 | 10 | 11 |
| 2016 | 11 | 16 |
| 2017 | 12 | 23 |
| 2018 | 12 | 9 |
| 2019 | 19 | 16 |
| 2020 | 11 | 11 |
| 2021 | 8 | 8 |
| 2022 | 12 | 4 |
| 2023 | 14 | 9 |
| 2024 | 9 | 5 |
| 2025 | 4 | 7 |
| 2026 | 5 | 6 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Microelectromechanical resonator18 Aug 2026US 12,712,521 B2SiTime Corporation
- Plate wave devices with wave confinement structures and fabrication methods7 Jul 2026US 12,676,587 B2Qorvo US, Inc.
- Ion irradiation of microelectromechanical resonators23 Jun 2026US 12,665,562 B2The United States of America as represented by the Secretary of the Air Force
- Method of manufacture for single crystal capacitor dielectric for a resonance circuit10 Feb 2026US 12,549,153 B2Akoustis Technologies Corp.
- Piezoelectric microelectromechanical resonator device and corresponding manufacturing process20 Jan 2026US 12,531,538 B2STMicroelectronics S,r.l.
- Tuning The Frequency-Temperature Response of MEMS Resonators Using Composite Eigenmodes23 Jul 2026US 2026/0213722 A1Stathera IP Holdings Inc.
- Method for manufacturing an electronic device11 Jun 2026US 2026/0159381 A1Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Wafer-level-packaged silicon-piezoelectric resonator21 May 2026US 2026/0142643 A1University of Florida Research Foundation, Inc.
- Method of manufacture for single crystal capacitor dielectric for a resonance circuit14 May 2026US 2026/0135539 A1Akoustis Technologies Corp.
- Thermal annealing of piezoelectric microelectromechanical systems (mems) stacks26 Mar 2026US 2026/0090275 A1QUALCOMM Incorporated
Most cited
By later US patents
- Single crystal micromechanical resonator and fabrication methods thereof279US 9,525,398 B1Sandia Corporation · 2016
- Nano- and micro-electromechanical resonators275US 9,425,765 B2Northeastern University · 2016
- Lamb wave type frequency device and method thereof183US 7,728,483 B2Seiko Epson Corporation · 2010
- Guided wave devices with embedded electrodes and non-embedded electrodes171US 10,211,806 B2Qorvo US, Inc. · 2019
- Piezoelectric on semiconductor-on-insulator microelectromechanical resonators128US 6,909,221 B2Georgia Tech Research Corporation · 2005