Single crystal micromechanical resonator and fabrication methods thereof
AssigneeSandia Corporation
InventorsRoy H. Olsson, Thomas A. Friedmann, Sara Jensen Homeijer, Michael Wiwi, Khalid Mikhiel Hattar, Blythe Clark, Todd Bauer, Stuart B. Van Deusen
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Abstract
The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.
Claims17
A method for fabricating a micromechanical resonator, the method comprising:
- (i) providing a single crystal comprising lithium niobate or lithium tantalate;
- (ii) treating an exposed area of the single crystal with ions, thereby creating an ion damaged region below a top surface of the crystal;
- (iii) providing at least one trench that defines a first dimension of the resonator;
- (iv) removing the ion damaged layer with an etchant, thereby releasing at least a resonating portion of the resonator from the crystal;
- and
- (v) annealing the resonator.
A method for fabricating a micromechanical resonator, the method comprising:
- providing a single crystal comprising lithium niobate or lithium tantalate;
- treating an exposed area of the single crystal with ions, thereby creating an ion damaged region below a top surface of the crystal;
- providing at least one trench that defines a first dimension of the resonator;
- depositing a protective layer on the first dimension of the resonator;
- and
- removing the ion damaged layer with an etchant, thereby releasing at least a resonating portion of the resonator from the crystal.
A method for fabricating a micromechanical resonator, the method comprising:
- providing a single crystal;
- treating an exposed area of the single crystal with ions, thereby creating an ion damaged region below a top surface of the crystal;
- depositing a metal layer on the top surface of the crystal;
- providing at least one trench that defines a first dimension of the resonator;
- and
- removing the ion damaged layer with an etchant.
Dependencies are inferred from the claim text.