H01J 37/243
Beam current control or regulation circuits
Official title: {Beam current control or regulation circuits (H01J37/241 takes precedence)}
H01J37/243 (Beam current control or regulation circuits) appears on 109 US grants and 113 published applications in this corpus.
Search patents in H01J- Granted patents
- 109
- Published applications
- 113
- Assignees
- 77
- Inventors
- 264
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 3 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 2 | 0 |
| 1983 | 1 | 0 |
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 3 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 2 |
| 2004 | 2 | 2 |
| 2005 | 0 | 1 |
| 2006 | 2 | 3 |
| 2007 | 0 | 3 |
| 2008 | 6 | 2 |
| 2009 | 0 | 3 |
| 2010 | 1 | 1 |
| 2011 | 2 | 2 |
| 2012 | 0 | 3 |
| 2013 | 3 | 2 |
| 2014 | 1 | 4 |
| 2015 | 8 | 10 |
| 2016 | 6 | 4 |
| 2017 | 2 | 4 |
| 2018 | 8 | 10 |
| 2019 | 7 | 6 |
| 2020 | 7 | 8 |
| 2021 | 4 | 7 |
| 2022 | 8 | 8 |
| 2023 | 10 | 8 |
| 2024 | 3 | 5 |
| 2025 | 4 | 7 |
| 2026 | 5 | 8 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Control system and method for ion energy distribution in plasma process chambers using tailored waveform generators15 Sep 2026US 12,738,450 B2Inspiring Atoms Pte Ltd
- Method for operating a multi-beam particle microscope with fast closed-loop beam current control, computer program product and multi-beam particle microscope25 Aug 2026US 12,719,015 B2Carl Zeiss MultiSEM GmbH
- Method for doping two-dimensional material based on cluster ion implantation25 Aug 2026US 12,719,017 B2Jiangsu Jichuang Atomic Cluster Technology Research Institute Co., Ltd.
- Method for estimating cathode lifetime of electron gun, and electron beam writing apparatus28 Jul 2026US 12,695,046 B2NuFlare Technology, Inc.
- Ion milling device30 Jun 2026US 12,671,056 B2Hitachi High-Tech Corporation
- Ion Milling Device and Processing Method Using Same27 Aug 2026US 2026/0253837 A1Hitachi High-Tech Corporation
- Charged particle beam inspection apparatus and method23 Jul 2026US 2026/0213118 A1ASML Netherlands B. V.
- Multiple charged-particle beam apparatus and methods of operating the same11 Jun 2026US 2026/0162932 A1ASML Netherlands B. V.
- Multiple charged-particle beam irradiation apparatus, multiple charged-particle beam irradiation method, correction map generation apparatus, and correction map generation method28 May 2026US 2026/0148927 A1NuFlare Technology, Inc.
- Method for substrate processing5 Mar 2026US 2026/0066217 A1Tel Manufacturing and Engineering of America, Inc.
Most cited
By later US patents
- Electromechanical magnetometer and applications thereof38US 9,383,208 B2Analog Devices, Inc. · 2016
- Method and system for ultrafast photoelectron microscope25US 7,154,091 B2California Institute of Technology · 2006
- Field emission electron gun having automatic current control13US 3,936,756 ANihon Denshi Kabushiki Kaisha · 1976
- Highly-steady beam generating for charged particles11US 4,467,205 ADr. Ing. Rudolf Hill GmbH · 1984
- Method and system for ultrafast photoelectron microscope11US 7,442,931 B2California Institute of Technology · 2008