Method and system for ultrafast photoelectron microscope

A method of operating a transmission electron microscope comprising a laser source, a cathode, and an electron lens assembly, the method comprising:

• forming a train of optical pulses, each of the optical pulses being characterized by a Full Width Half Maximum (“FWHM”) pulse length of less than 1 ps in duration;
• providing a sample for imaging disposed on a stage assembly;
• generating a train of electron pulses by impinging the train of optical pulses on the cathode, the train of electron pulses being associated with the train of optical pulses, each of the electron pulses being characterized by a FWHM pulse length less than 1 ps in duration;
• directing the train of electron pulses toward the sample using at least the electron lens assembly;
• capturing a portion of the train of electron pulses using a sensing device to derive information associated with an image of the sample;
• and
• processing the information associated with the image of the sample.

A transmission electron microscope (TEM) system capable of acquiring time resolved images;

• the TEM system comprising:
• a laser producing a photon pulse;
• a beam splitter adapted to divide the photon pulse into an electron generation photon pulse and an initiation photon pulse;
• a cathode adapted to produce an electron pulse in response to activation by the electron generation photon pulse;
• an optical delay stage adapted to introduce a time delay between the initiation photon pulse and the electron pulse;
• a sample irradiated by the initiation photon pulse and the electron pulse;
• and
• an electron detector producing an image of the sample in response to the irradiation of the sample by the electron pulse.

A method of acquiring time-resolved images using an electron microscope, the method comprising:

• providing a feature of a sample to be imaged, the feature having a size;
• placing the sample onto a stage assembly;
• maintaining the sample on the stage assembly in a vacuum environment;
• directing one or more first pulses of electrons toward the feature of the sample, the one or more first pulses of electrons each having about one to about 1000 electrons;
• capturing a first portion of the one or more first pulses of electrons using a sensing device during a first portion of time, the portion of the one or more first pulses of the electrons being associated with a first image of the feature of the sample during the first portion of time;
• transferring first information associated with the first portion of the one or more first pulses of electrons associated with the first image of the feature of the sample during the first portion of time from the sensing device to a processing device;
• directing one or more second pulses of electrons toward the feature of the sample, the one or more second pulses of electrons each having about one to about 1000 electrons;
• capturing a second portion of the one or more second pulses of electrons using the sensing device during a second portion of time, the portion of the one or more second pulses of electrons being associated with a second image of the feature of the sample during the second portion of time;
• and
• transferring second information associated with the second portion of the one or more second pulses of electrons associated with the second image of the feature of the sample during the second portion of time from the sensing device to the processing device.

A method for forming images from one or more samples using electron beam pulses, the method comprising:

• providing a feature of a sample to be imaged, the feature having a size of about 100 nanometers and less;
• placing the sample onto a stage assembly;
• maintaining the sample on the stage assembly in a vacuum environment;
• directing one or more pulses of electrons toward the feature of the sample, the one or more pulses of electrons each having about 10 to about 1000 electrons;
• capturing a portion of the one or more pulses of electrons using a sensing device, the portion of the one or more pulses of the electrons being associated with an image of the feature of the sample;
• transferring information associated with the portion of the one or more pulses of electrons associated with the image of the feature of the sample from the sensing device to a processing device;
• and
• outputting a visual image associated with the feature of the sample using at least the information associated with the portion of the one or more pulses of electrons associated with the image of the feature of the sample.

A system for characterizing one or more samples, the system comprising:

• a stage assembly, the stage assembly comprising a sample to be characterized;
• a laser source, the laser source being capable of emitting an optical pulse of less than 1 ps in duration;
• a cathode coupled to the laser source, the cathode being capable of emitting an electron pulse less than 1 ps in duration;
• an electron lens assembly adapted to focus the electron pulse onto the sample disposed on the stage;
• a detector adapted to capture one or more electrons passing through the sample, the one or more electrons passing through the sample being representative of the structure of the sample, the detector providing a data signal associated with the one or more electrons passing through the sample that represents the structure of the sample;
• and
• a processor coupled to the detector, the processor being adapted to process the data signal associated with the one or more electrons passing through the sample to output information associated with the structure of the sample;
• and
• an output device coupled to the processor, the output device being adapted to output the information associated with the structure of the sample.

A method for capturing information from one or more samples using electron beam pulses, the method comprising:

• providing a feature of a sample to be imaged, the feature having a size;
• placing the sample onto a stage assembly;
• maintaining the sample on the state assembly in a vacuum environment;
• directing one or more pulses of electrons toward the feature of the sample, the one or more pulses of electrons each having about one to about 1000 electrons;
• capturing a portion of the one or more pulses of electrons using a sensing device, the portion of the one or more pulses of the electrons being associated with a characterization of the feature of the sample;
• transferring information associated with the portion of the one or more pulses of electrons associated with the characterization of the feature of the sample from the sensing device to a processing device;
• and
• outputting one or more indications associated with the feature of the sample using at least the information associated with the portion of the one or more pulses of electrons associated with the image of the feature of the sample.

A method of acquiring time-resolved images using an electron microscope, the method comprising:

• providing a feature of a sample to be imaged, the feature having a size;
• placing the sample onto a stage assembly;
• maintaining the sample on the stage assembly in a vacuum environment;
• directing a first train of electron pulses toward the feature of the sample, the first train of electron pulses having an average temporal pulse width of less than 1 ps;
• capturing a first portion of the first train of electron pulses using a sensing device during a first portion of time, the portion of the first train of electron pulses being associated with a first image of the feature of the sample during the first portion of time;
• transferring first information associated with the first portion of the first train of electron pulses associated with the first image of the feature of the sample during the first portion of time from the sensing device to a processing device;
• directing a second train of electron pulses toward the feature of the sample, the second train of electron pulses having an average temporal pulse width of less than 1 ps;
• capturing a second portion of the second train of electron pulses using the sensing device during a second portion of time, the portion of the second train of electron pulses being associated with a second image of the feature of the sample during the second portion of time;
• and
• transferring second information associated with the second portion of the second train of electron pulses associated with the second image of the feature of the sample during the second portion of time from the sensing device to the processing device.

A method of performing time resolved characterization of a sample, the method comprising:

• providing a photon pulse;
• providing a beam splitter to adapted to divide the photon pulse into an electron generation photon pulse and an initiation photon pulse;
• providing a cathode adapted to produce an electron pulse in response to activation by the electron generation photon pulse;
• providing an optical delay stage adapted to introduce a time delay between the initiation photon pulse and the electron pulse;
• providing a sample irradiated by the initiation photon pulse and the electron pulse;
• and
• providing an electron detector producing an image of the sample in response to the irradiation of the sample by the electron pulse.

A spectroscopy system comprising:

• a laser producing a photon pulse train;
• a beam splitter adapted to divide the photon pulse train into an electron generation photon pulse train and an spectroscopy photon pulse train;
• a non-linear optical element adapted to tune the wavelength of the spectroscopy photon pulse train to an initiation wavelength;
• a cathode adapted to produce an electron pulse train in response to activation by the electron generation photon pulse train;
• an optical delay stage adapted to introduce a time delay between the spectroscopy photon pulse train and the electron pulse train;
• a sample irradiated by the spectroscopy photon pulse train and the electron pulse train;
• and
• an electron detector producing an image of the sample in response to the irradiation of the sample by the electron pulse train.

A method for determining temporal characteristics of one or more feature of objects using an electron microscope assembly, the method comprising:

• providing a sample including one or more features, the sample being disposed on a stage assembly;
• generating one or more electron pulses, the one or more electron pulses having a FWHM pulse length of less than 1 ps in duration;
• directing the one or more electron pulses toward the one or more features of the sample during a time period associated with a period of detection;
• capturing a portion of the one or more electron pulses using a sensing device to derive information associated with a characteristic of the one or more features of the sample;
• and
• processing at least the information to identify a temporal characteristic of the one or more features of the sample.