H01J 2237/31708
Unpatterned
Official title: unpatterned
H01J2237/31708 (Unpatterned) appears on 22 US grants and 12 published applications in this corpus.
Search patents in H01J- Granted patents
- 22
- Published applications
- 12
- Assignees
- 10
- Inventors
- 39
- Latest grant
- 16 Apr 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2004 | 0 | 1 |
| 2005 | 0 | 1 |
| 2006 | 1 | 1 |
| 2007 | 1 | 1 |
| 2008 | 1 | 1 |
| 2009 | 2 | 1 |
| 2010 | 1 | 0 |
| 2011 | 0 | 0 |
| 2012 | 1 | 1 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 1 | 1 |
| 2016 | 3 | 0 |
| 2017 | 4 | 0 |
| 2018 | 1 | 1 |
| 2019 | 1 | 1 |
| 2020 | 2 | 1 |
| 2021 | 1 | 0 |
| 2022 | 0 | 1 |
| 2023 | 1 | 0 |
| 2024 | 1 | 0 |
By publication year.
Recent patents
- Substrate treating apparatus, ion implantation apparatus, and ion implantation method16 Apr 2024US 11,961,695 B2Semes Co., Ltd.
- Fabricating non-uniform diffraction gratings21 Mar 2023US 11,609,365 B2Magic Leap, Inc.
- Scan and corrector magnet designs for high throughput scanned beam ion implanter15 Jun 2021US 11,037,754 B2Axcelis Technologies, Inc.
- Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays31 Mar 2020US 10,607,845 B1
- Scan and corrector magnet designs for high throughput scanned beam ion implanter4 Feb 2020US 10,553,392 B1Axcelis Technologies, Inc.
- Substrate treating apparatus, ion implantation apparatus, and ion implantation method24 Feb 2022US 2022/0059309 A1Semes Co., Ltd.
- Scan and corrector magnet designs for high throughput scanned beam ion implanter18 Jun 2020US 2020/0194221 A1Axcelis Technologies, Inc.
- Fabricating non-uniform diffraction gratings5 Dec 2019US 2019/0369310 A1Magic Leap, Inc.
- Fabricating non-uniform diffraction gratings5 Apr 2018US 2018/0095201 A1Magic Leap, Inc.
- Angular Scanning Using Angular Energy Filter5 Nov 2015US 2015/0318142 A1Axcelis Technologies, Inc.
Most cited
By later US patents
- Precision deposition using miniature-column charged particle beam arrays13US 9,556,521 B1Multibeam Corporation · 2017
- Precision substrate material removal using miniature-column charged particle beam arrays11US 9,466,464 B1Multibeam Corporation · 2016
- Precision deposition using miniature-column charged particle beam arrays10US 9,453,281 B1Multibeam Corporation · 2016
- Precision substrate material removal using miniature-column charged particle beam arrays10US 9,673,114 B1Multibeam Corporation · 2017
- Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays9US 10,020,200 B12018