H01J 2237/30488
Raster scan
H01J2237/30488 (Raster scan) appears on 79 US grants and 77 published applications in this corpus.
Search patents in H01J- Granted patents
- 79
- Published applications
- 77
- Assignees
- 47
- Inventors
- 183
- Latest grant
- 7 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 1 | 0 |
| 1985 | 3 | 0 |
| 1986 | 0 | 0 |
| 1987 | 2 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 2 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 3 | 0 |
| 2002 | 2 | 2 |
| 2003 | 1 | 0 |
| 2004 | 1 | 3 |
| 2005 | 3 | 8 |
| 2006 | 4 | 3 |
| 2007 | 5 | 8 |
| 2008 | 3 | 5 |
| 2009 | 10 | 5 |
| 2010 | 2 | 2 |
| 2011 | 1 | 3 |
| 2012 | 4 | 0 |
| 2013 | 0 | 6 |
| 2014 | 2 | 2 |
| 2015 | 2 | 3 |
| 2016 | 4 | 1 |
| 2017 | 2 | 1 |
| 2018 | 1 | 2 |
| 2019 | 2 | 5 |
| 2020 | 3 | 3 |
| 2021 | 3 | 0 |
| 2022 | 3 | 2 |
| 2023 | 1 | 2 |
| 2024 | 0 | 4 |
| 2025 | 2 | 5 |
| 2026 | 1 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method for particle beam-induced processing of a defect of a microlithographic photomask7 Jul 2026US 12,676,283 B2Carl Zeiss SMT GmbH
- Inspection device and inspection method23 Sep 2025US 12,424,407 B2Kioxia Corporation
- Optical system adjustment method for multi charged particle beam apparatus and computer readable recording medium2 Sep 2025US 12,406,828 B2NuFlare Technology, Inc.
- Uniform milling of adjacent materials using parallel scanning fib25 Apr 2023US 11,636,997 B2Applied Materials Israel Ltd.
- Methods and systems for raster scanning a surface of an object using a particle beam22 Nov 2022US 11,504,798 B2Carl Zeiss Microscopy GmbH
- Method for particle beam-induced processing of a defect of a microlithographic photomask16 Jul 2026US 2026/0204510 A1Carl Zeiss SMT GmbH
- Raster beam writing method and raster beam writing apparatus12 Mar 2026US 2026/0074144 A1NuFlare Technology, Inc.
- Multi-beam charged particle microscope design with adaptive detection system4 Dec 2025US 2025/0372343 A1
- Fast closed-loop control of multi-beam charged particle system6 Nov 2025US 2025/0343021 A1
- Method for operating a particle beam apparatus, computer program product and particle beam apparatus for carrying out the method15 May 2025US 2025/0157782 A1Carl Zeiss Microscopy GmbH
Most cited
By later US patents
- Multijunction photovoltaic cells and panels using a silicon or silicon-germanium active substrate cell for space and terrestrial applications199US 6,340,788 B12002
- Dose modulation and pixel deflection for raster scan lithography66US 5,393,987 AEtec Systems, Inc. · 1995
- Scanning charged particle beams50US 8,304,750 B2Carl Zeiss NTS GmbH · 2012
- Method of forming a fine pattern with a charged particle beam46US 4,712,013 AKabushiki Kaisha Toshiba · 1987
- Virtual addressing for E-beam lithography45US 4,498,010 AThe Perkin-Elmer Corporation · 1985