H01J 2237/2807
X-rays
H01J2237/2807 (X-rays) appears on 93 US grants and 94 published applications in this corpus.
Search patents in H01J- Granted patents
- 93
- Published applications
- 94
- Assignees
- 44
- Inventors
- 217
- Latest grant
- 7 Oct 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 2 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 1 |
| 2002 | 0 | 0 |
| 2003 | 1 | 0 |
| 2004 | 0 | 3 |
| 2005 | 1 | 0 |
| 2006 | 3 | 3 |
| 2007 | 4 | 2 |
| 2008 | 1 | 2 |
| 2009 | 1 | 4 |
| 2010 | 1 | 3 |
| 2011 | 2 | 2 |
| 2012 | 8 | 5 |
| 2013 | 2 | 4 |
| 2014 | 3 | 6 |
| 2015 | 5 | 6 |
| 2016 | 2 | 4 |
| 2017 | 8 | 9 |
| 2018 | 9 | 8 |
| 2019 | 4 | 7 |
| 2020 | 11 | 6 |
| 2021 | 3 | 4 |
| 2022 | 7 | 5 |
| 2023 | 6 | 4 |
| 2024 | 2 | 2 |
| 2025 | 3 | 3 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Semiconductor analysis system7 Oct 2025US 12,436,114 B2Hitachi High-Tech Corporation
- Method and apparatus for inspecting a sample by means of multiple charged particle beamlets20 May 2025US 12,306,121 B2Delmic IP B.V.
- 3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample8 Apr 2025US 12,272,518 B2Applied Materials Israel Ltd.
- Scanning charged-particle-beam microscopy with energy-dispersive x-ray spectroscopy17 Sep 2024US 12,094,684 B1Mochii, Inc.
- Method of examining a sample using a charged particle microscope30 Apr 2024US 11,971,372 B2FEI Company
- Processing Method and Charged Particle Beam Device30 Jul 2026US 2026/0221384 A1Hitachi High-Tech Corporation
- Charged Particle Beam Apparatus and Image Production Method25 Dec 2025US 2025/0391630 A1JEOL Ltd.
- A multi-mode low-voltage electron microscope10 Jul 2025US 2025/0226173 A1Delong Instruments A.S.
- 3d metrology from 3d datacube created from stack of registered images obtained during delayering of the sample26 Jun 2025US 2025/0210301 A1Applied Materials Israel Ltd.
- Improved navigation for electron microscopy10 Oct 2024US 2024/0339293 A1Oxford Instruments Nanotechnology Tools Limited
Most cited
By later US patents
- Electron microscope36US 5,866,905 AHitachi, Ltd. · 1999
- Electron microscope32US 6,051,834 AHitachi, Ltd. · 2000
- Method and apparatus for X-ray analyses30US 5,877,498 AHitachi, Ltd. · 1999
- X-ray enhanced SEM critical dimension measurement21US 5,798,525 AInternational Business Machines Corporation · 1998
- Cluster analysis of unknowns in SEM-EDS dataset21US 8,664,595 B2FEI Company · 2014