H01J 2237/2446
Position sensitive detectors
H01J2237/2446 (Position sensitive detectors) appears on 391 US grants and 420 published applications in this corpus.
Search patents in H01J- Granted patents
- 391
- Published applications
- 420
- Assignees
- 149
- Inventors
- 799
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 4 | 0 |
| 1989 | 4 | 0 |
| 1990 | 2 | 0 |
| 1991 | 3 | 0 |
| 1992 | 3 | 0 |
| 1993 | 2 | 0 |
| 1994 | 2 | 0 |
| 1995 | 2 | 0 |
| 1996 | 3 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 3 | 7 |
| 2003 | 3 | 7 |
| 2004 | 4 | 8 |
| 2005 | 6 | 6 |
| 2006 | 11 | 25 |
| 2007 | 15 | 11 |
| 2008 | 18 | 22 |
| 2009 | 13 | 17 |
| 2010 | 14 | 11 |
| 2011 | 15 | 12 |
| 2012 | 13 | 18 |
| 2013 | 21 | 12 |
| 2014 | 9 | 15 |
| 2015 | 11 | 19 |
| 2016 | 15 | 16 |
| 2017 | 19 | 16 |
| 2018 | 10 | 11 |
| 2019 | 17 | 25 |
| 2020 | 27 | 36 |
| 2021 | 27 | 24 |
| 2022 | 22 | 21 |
| 2023 | 22 | 31 |
| 2024 | 13 | 20 |
| 2025 | 21 | 21 |
| 2026 | 10 | 9 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Fiber optics plate, scintillator panel, radiation detector, electron microscope, X-ray blocking method and electron beam blocking method18 Aug 2026US 12,709,569 B2Hamamatsu Photonics K.K.
- System and method of verifying workpiece alignment18 Aug 2026US 12,713,870 B2Axcelis Technologies, Inc.
- Material analysis with multiple detectors21 Apr 2026US 12,607,581 B2Oxford Instruments Nanotechnology Tools Limited
- Multiple particle beam system with a contrast correction lens system14 Apr 2026US 12,603,245 B2Carl Zeiss MultiSEM GmbH
- Detector and method for obtaining Kikuchi images14 Apr 2026US 12,603,246 B2Bruker Nano, Inc.
- Scanning electron microscope and specimen observation method10 Sep 2026US 2026/0269169 A1Hitachi High-Tech Corporation
- Charged particle apparatus, method of projecting charged particles, method of assessing a sample23 Jul 2026US 2026/0213115 A1ASML Netherlands B. V.
- Charged-particle counting via non-backthinned integration detectors and beam energy quantization18 Jun 2026US 2026/0171347 A1FEI Electron Optics B.V.
- Charged particle beam detector with adaptive detection area for multiple field of view settings18 Jun 2026US 2026/0171349 A1ASML Netherlands B. V.
- Scanning Electron Microscope and Gradient Map Generation Method16 Apr 2026US 2026/0106107 A1JEOL Ltd.
Most cited
By later US patents
- Wafer pattern defect detection method and apparatus therefor138US 5,576,833 AKabushiki Kaisha Toshiba · 1996
- Pattern inspection apparatus and electron beam apparatus86US 5,430,292 AFujitsu Limited · 1995
- Pattern inspection apparatus and electron beam apparatus86US 5,557,105 AFujitsu Limited · 1996
- Process for controlling the strike positions of a plurality of electron beams on a melting bath77US 4,988,844 ALeybold Aktiengesellschaft · 1991
- Testing apparatus using charged particles and device manufacturing method using the testing apparatus76US 7,138,629 B2Ebara Corporation · 2006