H01J 2237/24465
Sectored detectors
Official title: Sectored detectors, e.g. quadrants
H01J2237/24465 (Sectored detectors) appears on 119 US grants and 138 published applications in this corpus.
Search patents in H01J- Granted patents
- 119
- Published applications
- 138
- Assignees
- 52
- Inventors
- 294
- Latest grant
- 7 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 2 |
| 2003 | 1 | 1 |
| 2004 | 0 | 1 |
| 2005 | 1 | 3 |
| 2006 | 1 | 6 |
| 2007 | 2 | 0 |
| 2008 | 3 | 7 |
| 2009 | 2 | 4 |
| 2010 | 8 | 4 |
| 2011 | 4 | 5 |
| 2012 | 4 | 9 |
| 2013 | 8 | 5 |
| 2014 | 4 | 4 |
| 2015 | 2 | 6 |
| 2016 | 4 | 4 |
| 2017 | 5 | 6 |
| 2018 | 5 | 2 |
| 2019 | 2 | 13 |
| 2020 | 13 | 13 |
| 2021 | 12 | 7 |
| 2022 | 7 | 6 |
| 2023 | 6 | 11 |
| 2024 | 6 | 8 |
| 2025 | 7 | 7 |
| 2026 | 3 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Charged particle beam apparatus and processor system7 Apr 2026US 12,597,584 B2Hitachi High-Tech Corporation
- Systems and methods for signal electron detection17 Feb 2026US 12,555,738 B2ASML Netherlands B. V.
- Ion collector for use in plasma systems10 Feb 2026US 12,548,745 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Charged particle beam device30 Dec 2025US 12,512,294 B2Hitachi High-Tech Corporation
- Inspection device and inspection method23 Sep 2025US 12,424,407 B2Kioxia Corporation
- Scanning electron microscope and specimen observation method10 Sep 2026US 2026/0269169 A1Hitachi High-Tech Corporation
- Charged particle beam detector with adaptive detection area for multiple field of view settings18 Jun 2026US 2026/0171349 A1ASML Netherlands B. V.
- Scanning Electron Microscope and Gradient Map Generation Method16 Apr 2026US 2026/0106107 A1JEOL Ltd.
- Systems and methods of energy discrimination of backscattered charged-particles1 Jan 2026US 2026/0004991 A1ASML Netherlands B. V.
- Charged particle beam writing method and charged particle beam writing apparatus4 Dec 2025US 2025/0372342 A1NuFlare Technology, Inc.
Most cited
By later US patents
- Twin beam charged particle column and method of operating thereof61US 8,378,299 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · 2013
- Electron detector for use in a gaseous environment53US 4,897,545 AElectroScan Corporation · 1990
- Apparatus and method for obtaining topographical dark-field images in a scanning electron microscope45US 7,714,287 B1KLA-Tencor Corporation · 2010
- Detector objective for particle beam apparatus43US 4,831,266 ASiemens Aktiengesellschaft · 1989
- Apparatus of plural charged-particle beams41US 10,141,160 B2Hermes Microvision, Inc. · 2018