Charged particle beam detector with adaptive detection area for multiple field of view settings

A non-transitory computer-readable medium that stores a set of instructions that is executable by at least one processor of an apparatus to cause the apparatus to perform operations comprising:

• performing a first scan of a sample surface with a charged particle beam under a first exposure setting to cause emitted charged particles from the sample surface to land in a first detector region of a charged particle detector, the first detector region comprising a first noise value of a noise parameter;
• generating a first image based on the first scan;
• performing a second scan of the sample surface with a charged particle beam under a second exposure setting to cause emitted charged particles from the sample surface to land in a second detector region of the charged particle detector, the second detector region comprising a second noise value of a noise parameter, the second noise value being higher than the first noise value;
• and
• generating a second image based on the second scan, the first image having a higher accuracy than the second image, wherein
• the first detector region comprises a first segment of the charged particle detector, the second detector region comprises the first segment and a second segment of the charged particle detector, and
• the second detector region is larger than the first detector region.