H01J 2237/1405
Constructional details
H01J2237/1405 (Constructional details) appears on 169 US grants and 206 published applications in this corpus.
Search patents in H01J- Granted patents
- 169
- Published applications
- 206
- Assignees
- 75
- Inventors
- 338
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 1 |
| 2003 | 4 | 2 |
| 2004 | 2 | 2 |
| 2005 | 1 | 4 |
| 2006 | 4 | 8 |
| 2007 | 3 | 5 |
| 2008 | 2 | 8 |
| 2009 | 8 | 8 |
| 2010 | 4 | 7 |
| 2011 | 11 | 8 |
| 2012 | 8 | 4 |
| 2013 | 3 | 4 |
| 2014 | 8 | 8 |
| 2015 | 11 | 18 |
| 2016 | 12 | 9 |
| 2017 | 8 | 9 |
| 2018 | 8 | 9 |
| 2019 | 12 | 15 |
| 2020 | 10 | 20 |
| 2021 | 9 | 7 |
| 2022 | 9 | 10 |
| 2023 | 11 | 11 |
| 2024 | 7 | 11 |
| 2025 | 6 | 11 |
| 2026 | 5 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Adjustable permanent magnetic lens having thermal control device11 Aug 2026US 12,706,270 B2IMS Nanofabrication GmbH
- Adjustable permanent magnetic lens having shunting device30 Jun 2026US 12,671,054 B2IMS Nanofabrication GmbH
- Magnetic multipole device, charged particle beam apparatus, and method of influencing a charged particle beam propagating along an optical axis16 Jun 2026US 12,658,402 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Magnetic lenses, charged particle microscope systems including the same, and associated methods19 May 2026US 12,633,490 B2FEI Company
- Charged particle source28 Apr 2026US 12,614,691 B2ASML Netherlands B. V.
- Charged Particle Beam Device6 Aug 2026US 2026/0229443 A1Hitachi High-Tech Corporation
- Objective lens cooling system30 Jul 2026US 2026/0221375 A1ASML Netherlands B. V.
- Split objective lens for electron beam to enhance topographical imaging2 Jul 2026US 2026/0188603 A1
- Ion implanter28 May 2026US 2026/0148925 A1Advanced Ion Beam Technology, Inc.
- Multiple particle beam system, in particular multi-beam particle microscope, having a fast magnetic lens and the use thereof2 Apr 2026US 2026/0094783 A1
Most cited
By later US patents
- Objective lens arrangement usable in particle-optical systems33US 10,622,184 B2Applied Materials Israel Ltd. · 2020
- Sectored magnetic lens and method of use22US 6,515,287 B2KLA-Tencor Technologies Corporation · 2003
- Controlling the characteristics of implanter ion-beams20US 6,933,507 B22005
- Compact scanning electron microscope16US 7,906,762 B2FEI Company · 2011
- Dual beam system14US 7,161,159 B2FEI Company · 2007