Multiple particle beam system, in particular multi-beam particle microscope, having a fast magnetic lens and the use thereof

A multiple particle beam system configured to generate a plurality of individual charged particle beams, the multiple particle beam system comprising:

• a magnetic lens configured to have the plurality of individual charged particle beams pass therethrough;
• and
• a controller configured to control the magnetic lens,
• wherein:
• the magnetic lens comprises a coil, a winding body and a pole shoe;
• the coil is around the winding body;
• the winding body comprises a hollow body configured to have the plurality of individual particle beams pass therethrough;
• the coil and the winding body are within the pole shoe;
• and
• the pole shoe comprises an opening configured to have a magnetic field created by the magnetic lens emerge therefrom;
• the pole shoe is configured to interact with the plurality of individual particle beams to obtain a lens effect;
• the winding body is electrically conductive;
• the winding body comprises an interruption configured to interrupt the electrical conductivity of the winding body in a circumferential direction around a particle-optical axis of the multiple particle beam system to reduce electrical eddy current in the winding body around the particle-optical axis when the magnetic lens is controlled dynamically.