H01J 2237/0812
Ionized cluster beam [icb] sources
Official title: Ionized cluster beam [ICB] sources
H01J2237/0812 (Ionized cluster beam [icb] sources) appears on 183 US grants and 224 published applications in this corpus.
Search patents in H01J- Granted patents
- 183
- Published applications
- 224
- Assignees
- 58
- Inventors
- 223
- Latest grant
- 22 Jul 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 3 | 0 |
| 1997 | 0 | 0 |
| 1998 | 3 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 4 |
| 2002 | 5 | 15 |
| 2003 | 7 | 6 |
| 2004 | 9 | 9 |
| 2005 | 2 | 10 |
| 2006 | 8 | 16 |
| 2007 | 5 | 10 |
| 2008 | 11 | 12 |
| 2009 | 10 | 29 |
| 2010 | 17 | 22 |
| 2011 | 9 | 12 |
| 2012 | 15 | 6 |
| 2013 | 11 | 11 |
| 2014 | 11 | 9 |
| 2015 | 8 | 12 |
| 2016 | 9 | 7 |
| 2017 | 4 | 3 |
| 2018 | 0 | 9 |
| 2019 | 6 | 7 |
| 2020 | 9 | 6 |
| 2021 | 8 | 2 |
| 2022 | 1 | 4 |
| 2023 | 4 | 1 |
| 2024 | 0 | 0 |
| 2025 | 1 | 1 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Support body, manufacturing apparatus for support body, and manufacturing method for support body22 Jul 2025US 12,368,034 B2Ayabo Corporation
- Method and apparatus for forming substrate surfaces with exposed crystal lattice using accelerated neutral atom beam22 Aug 2023US 11,735,432 B2Exogenesis Corporation
- Tuning gas cluster ion beam systems1 Aug 2023US 11,715,620 B2Tel Manufacturing and Engineering of America, Inc.
- Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological materials made thereby11 Jul 2023US 11,698,582 B2Exogenesis Corporation
- Gratings with variable depths formed using planarization for waveguide displays14 Feb 2023US 11,579,364 B2Meta Platforms Technologies, LLC
- Gas cluster ion beam apparatus4 Jun 2026US 2026/0155330 A1IIPT Inc.
- Gas cluster ion beam apparatus25 Dec 2025US 2025/0391627 A1IIPT Inc.
- Loaded body, apparatus for producingloaded body and method for producing loaded body29 Jun 2023US 2023/0203642 A1Ayabo Corporation
- Tuning Gas Cluster Ion Beam Systems10 Nov 2022US 2022/0359155 A1Tel Manufacturing and Engineering of America, Inc.
- Gratings with variable depths formed using planarization for waveguide displays13 Oct 2022US 2022/0326436 A1Meta Platforms Technologies, LLC
Most cited
By later US patents
- Methods of forming doped and un-doped strained semiconductor materials and semiconductor films by gas-cluster-ion-beam irradiation and materials and film products112US 7,259,036 B2TEL Epion Inc. · 2007
- Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology79US 6,676,989 B2Epion Corporation · 2004
- Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate71US 4,152,478 AFutaba Denshi Kogyo K. K. · 1979
- Gas cluster ion beam smoother apparatus71US 6,486,478 B1Epion Corporation · 2002
- Substrate surface treatment method65US 5,814,194 AMatsushita Electric Industrial Co., Ltd. · 1998