H01J 2237/062
Reducing size of gun
H01J2237/062 (Reducing size of gun) appears on 22 US grants and 20 published applications in this corpus.
Search patents in H01J- Granted patents
- 22
- Published applications
- 20
- Assignees
- 21
- Inventors
- 59
- Latest grant
- 15 Apr 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 2 |
| 2006 | 0 | 1 |
| 2007 | 2 | 1 |
| 2008 | 0 | 0 |
| 2009 | 1 | 1 |
| 2010 | 0 | 1 |
| 2011 | 0 | 1 |
| 2012 | 1 | 1 |
| 2013 | 0 | 2 |
| 2014 | 2 | 0 |
| 2015 | 1 | 0 |
| 2016 | 0 | 2 |
| 2017 | 1 | 0 |
| 2018 | 1 | 0 |
| 2019 | 0 | 2 |
| 2020 | 2 | 3 |
| 2021 | 4 | 2 |
| 2022 | 1 | 1 |
| 2023 | 0 | 0 |
| 2024 | 0 | 0 |
| 2025 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Pulsed generator of electrically charged particles and method for using a pulsed generator of electrically charged particles15 Apr 2025US 12,278,082 B2Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Electron gun, electron microscope, three-dimensional additive manufacturing apparatus, and method of adjusting current of electron gun26 Jul 2022US 11,398,364 B2JEOL Ltd.
- Nano vacuum tube19 Oct 2021US 11,152,188 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Charged particle beam apparatus20 Jul 2021US 11,069,513 B2Kioxia Corporation
- Ionization chamber chip for a nano-aperture ion source, method of fabrication thereof, and a proton beam writing system6 Jul 2021US 11,056,315 B2National University of Singapore
- Pulsed generator of electrically charged particles and method for using a pulsed generator of electrically charged particles17 Nov 2022US 2022/0367139 A1Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Electron gun, electron microscope, three-dimensional additive manufacturing apparatus, and method of adjusting current of electron gun20 May 2021US 2021/0151278 A1JEOL Ltd.
- Charged particle beam apparatus4 Mar 2021US 2021/0066045 A1Kioxia Corporation
- An ionization chamber chip for a nano-aperture ion source, method of fabrication thereof, and a proton beam writing system2 Jul 2020US 2020/0211822 A1National University of Singapore
- Nano vacuum tube21 May 2020US 2020/0161085 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Pattern inspection apparatus and electron beam apparatus86US 5,557,105 AFujitsu Limited · 1996
- Charged particle beam apparatus55US 7,582,885 B2Hitachi High-Technologies Corporation · 2009
- Electron optic column and scanning electron microscope24US 5,399,860 AKabushiki Kaisha Toshiba · 1995
- Integrated sub-nanometer-scale electron beam systems17US 7,279,686 B2Biomed Solutions, LLC · 2007
- Self aligning electron beam gun having enhanced thermal and mechanical stability8US 5,416,381 AThe United States of America as represented by the United States Department of Energy · 1995