Integrated sub-nanometer-scale electron beam systems
AssigneeBiomed Solutions, LLC
InventorConrad W. Schneiker
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Abstract
A solid state sub-nanometer-scale electron beam emitter comprising a multi-layered structure having a nano-tip electron emitter and tunnel emission junction formed on substrate, an initial electron beam extraction electrode, a “nano-sandwich Einzel” electrode, and a topmost protective layer.
Claims27
A solid state sub-nanometer-scale electron beam emitter comprising a nano-tip electron emitter and tunnel emission junction formed on substrate, an initial electron beam extraction electrode, and an electron beam lens wherein said electron beam lens includes a nano-sandwich Einzel lens electrode and wherein said nano-sandwich Einzel lens electrode includes a lower primary electron beam acceleration electrode, an annular metal electrode, and an upper metal membrane electrode.
A solid state sub-nanometer-scale electron beam emitter comprising a nano-tip electron emitter and tunnel emission junction formed on substrate, an initial electron beam extraction electrode, and a protective layer disposed on said initial electron beam extraction electrode.
A nano-sandwich Einzel lens for directing an electron beam, said lens comprising a lower primary electron beam acceleration electrode, an annular metal electrode, and an upper metal membrane electrode.
Dependencies are inferred from the claim text.