Ionization chamber chip for a nano-aperture ion source, method of fabrication thereof, and a proton beam writing system
AssigneeNational University of Singapore
InventorsJeroen Anton Van Kan, Xinxin Xu, Santhana Ramam Pattabiraman, Rudy Pang
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Abstract
An ionization chamber chip, a nano-aperture ion source, a proton beam writing system, and a method of fabricating an ionization chamber chip. The method comprises the step of providing a first substrate comprising a first depression formed in a back surface thereof; providing a backing element attached at the back surface of the first substrate such that a chamber is formed comprising at least the first depression; forming a gas inlet in the first substrate in fluid communication with the chamber; and forming a first aperture structure in the first substrate in fluid communication with the chamber.
Claims20
An ionization chamber chip for a nano-aperture ion source, the ionization chamber chip comprising:
- a first substrate including a first depression formed in a back surface of the first substrate;
- a backing element attached at the back surface of the first substrate such that a chamber is formed including at least the first depression;
- a gas inlet formed in the first substrate in fluid communication with the chamber;
- a first aperture structure formed in the first substrate in fluid communication with the chamber;
- and
- an electrode layer formed on the back surface of the first substrate, the electrode layer extending into the first depression.
A method of fabricating an ionization chamber chip for a nano-aperture ion source, the method comprising:
- providing a first substrate including a first depression formed in a back surface of the first substrate;
- providing a backing element attached at the back surface of the first substrate such that a chamber is formed including at least the first depression;
- forming a gas inlet in the first substrate in fluid communication with the chamber;
- and
- forming a first aperture structure in the first substrate in fluid communication with the chamber;
- wherein the backing element includes a second substrate including a second depression formed in a back surface of the second substrate, wherein the back surface of the first substrate and the back surface of the second substrate are attached such that the chamber includes the adjoining first depression and the second depression.
An ionization chamber chip for a nano-aperture ion source, the ionization chamber chip comprising:
- a first substrate including a first depression formed in a back surface of the first substrate;
- a backing element attached at the back surface of the first substrate such that a chamber is formed including at least the first depression;
- a gas inlet formed in the first substrate in fluid communication with the chamber;
- and
- a first aperture structure formed in the first substrate in fluid communication with the chamber;
- wherein the backing element includes a second substrate including a second depression formed in a back surface of the second substrate, wherein the back surface of the first substrate and the back surface of the second substrate are attached such that the chamber includes the adjoining first depression and the second depression.
Dependencies are inferred from the claim text.