Charged particle beam apparatus
AssigneeKioxia Corporation
InventorsMitsuo Koike, See Kei Lee
Life of this patent
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Abstract
A charged particle beam apparatus has a chamber configured to accommodate a sample with. An inside of the chamber is decompressed. A tube having an opening is disposed in the chamber, and introduces a mixed gas having a plurality of types of gases, in a direction towards the sample. A first beam generator emits a charged particle beam toward at least one of a region between an opening of the tube and the sample, or a region of the sample against which the mixed gas collides. A mixed gas generator provides the mixed gas to the tube. The opening of the tube has an elongated shape in a cross section in a direction substantially perpendicular to a flow direction of the mixed gas.
Claims20
A charged particle beam apparatus comprising:
- a chamber configured to accommodate a sample with an inside of the chamber being decompressed;
- a tube having an opening disposed in the chamber and configured to introduce a mixed gas, having a plurality of types of gases, in a direction towards the sample;
- a first beam generator configured to emit a charged particle beam toward at least one of a region between an opening of the tube and the sample or a region of the sample against which the mixed gas collides;
- and
- a mixed gas generator configured to provide the mixed gas to the tube,
- wherein the opening of the tube has an elongated shape in a cross section in a direction substantially perpendicular to a flow direction of the mixed gas.
A method using a charged particle beam apparatus which comprises
- a chamber configured to accommodate a sample with, an inside of the chamber being decompressed,
- a tube having an opening disposed in the chamber,
- a first beam generator, and
- a mixed gas generator,
- the method comprising:
- providing, by the mixed gas generator, a mixed gas having a plurality of types of gases to the tube;
- introducing, via the tube, the mixed gas in a direction towards the sample, substantially perpendicular to a direction of an elongated shape of an opening of the tube in a cross section;
- and
- emitting, by the first beam generator, a charged particle beam toward at least one of a region between the opening of the tube and the sample, or a region of the sample against which the mixed gas collides.
Dependencies are inferred from the claim text.